Vibration Isolation Case Studies

Tier-1 Semiconductor Pyeongtaek P3 line ADVANTEST E5620 with DVIA-P4000 (serial 220617R5). Tuning November 1, 2023. Summary of vibration results as VC-band letters; per-axis Transmissibility and VC curves. Reference as Generic Vibration Criteria markdown table only.

DVIA-P4000 (serial 220714R4) inspection at Sungkyunkwan University Research Building 3F cleanroom with Raith EBPG5150. Caution VIB LED and Z-axis oscillation were addressed with feedback/feedforward re-tuning on Nov. 28, 2023. Summary VC table, axis transmissibility graphs, and VC curves are published; Reference uses the Generic Vibration Criteria markdown table only.

DVIA-P4000 (serial 220714R4) inspection at Sungkyunkwan University Research Building 3F cleanroom with Raith EBPG5150. Inspection February 19, 2024; Data Physics QUATTRO / SignalCalc ACE. VC summary tables for Active on and Float off, plus axis VC curves at Floor, isolator, equipment cover, and equipment top.

DVIA-P4000 (serial 220804R2) at Tier-1 Semiconductor Hwaseong NRD Line 3F with AIMS 1x. Compact installation report with axis VC curves and transmissibility plots; Reference uses the Generic Vibration Criteria markdown table only.

DVIA-P4000 (serial 220804R2) installation and vibration measurement at Tier-1 Semiconductor Hwaseong NRD Line 3F — AlMs 1x. Summary table and vertical, lateral, and longitudinal VC curves with transmissibility plots.

DVIA-PB2200 (serial 220926R2) SET-UP and vibration measurement at Hallym University Chuncheon cleanroom (C/R) with JEOL JBX-8100FS during equipment operation. Publishes equipment vibration specification graphics, VC curves and transmissibility by axis (no autospectrum in source), and multi-band measurement summary table.