Case Studies

Thermo Fisher Scientific Talos FIB-SEM at Broadcast and Television Metrology in Wuxi, China, delivered through the YIMO TECH channel — DVIA-ML1000 installation report for the 1st tuning trial, tuned on June 5, 2026 with the equipment turned on/IDLE. Vertically the floor measured 4.62 µm/s RMS at 15.5 Hz while the DVIA-ML1000 platform stayed at 0.11 µm/s; left to right it went from 0.71 to 0.14 µm/s at 4.5 Hz and front to back from 0.58 to 0.034 µm/s at 3.5 Hz, so every axis passed on both the floor and the platform. Because Thermo Fisher Scientific issues site-specific ambient vibration requirements from its own SE-Tools site survey, the applicable specification follows that survey report. The tuning request work order and the per-axis VC Curves, Autospectrum and Transmissibility plots from the UI program are published.

Installation report for the DVIA-MB1000 (S/N 161117R3) supporting a SEMIRON 5000 SEM in Lab 506 at SERON Technologies, Uiwang. A performance check was followed by vibration measurement with the equipment in the IDLE state. On the floor all three axes measured at the VC-D level, while on the DVIA-MB1000 platform the vertical (Z), left-to-right (X) and front-to-back (Y) axes all reached VC-G, so no additional re-tuning was required. Per-axis Autospectrum and VC Curves plus the installation photo are published.

DVIA-U1000 active vibration isolation platform (serial 241217R6) supporting a ZEISS EVO 10 SEM at End User Shanghai Fasteners and Welding Materials Technology Research Institute Co., Ltd. (上海紧焊所) in Shanghai, China, reported by YIMOTECH. This is the 2nd tuning trial on the same unit: the platform was retuned on 2026.08.04 and vibration was measured with the equipment in the Turned off state. Published figures are the Chinese-language tuning request work order (调试请求书), the per-axis transmissibility traces captured from the DAEIL UI program for Vertical (Z), Left to Right (X) and Front to Back (Y), and an installation photo of the EVO 10 seated on the DVIA-U Series platform. The source report contains no vibration specification section and no pass/fail measurement summary table, so none is shown here.

YIMO TECH Yidong Optics SEM DVIA-ML1000 installation report (2nd tuning trial, tuned 2026.07.17) — at the Suzhou site for end user Yidong Optics Co., Ltd., the DVIA-ML1000 active vibration isolation platform was re-tuned and measured with the equipment in the IDLE state. The floor registered VC-D vertically, VC-F left to right and VC-E front to back, while the DVIA-ML1000 platform reached VC-G on all three axes. The tuning request work order (调试请求书), per-axis Autospectrum and VC Curves plots, and the installation photo are published.

DVIA-ULFB700 installation report (serial 260203R2) for a ZEISS Sigma 360 FE-SEM at End User Hubei University of Technology in Wuhan, China. Tuning on 2026.08.04 covered air pressure setting and per-axis control gain adjustment; vibration was then measured with the equipment Turned off, and both the floor and the DVIA-ULFB700 platform met the ZEISS vibration specification on all three axes (Vertical, Left to Right, Front to Back). Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and an installation photo of the installed Sigma 360.

Installation report (VOC 26-132) for the DVIA-P4000 vibration isolation system, serial 200805R3, installed under a Bruker AFM NM-VI6 on the 3rd floor of the V1 line (SR1 Building) at a Tier-1 Semiconductor Giheung site. Tuning date July 21, 2026; report written August 3, 2026. Site inspection and re-tuning were performed to resolve a recurring POS alarm on the isolator and to recover control margin under the payload loading condition. Measurement was made in the IDLE state against a 6.25 µm/s RMS (VC-D) specification from 1 to 100 Hz, using a B&K 3040-A-040 front end with Pulse Labshop 22 and a PCB 393B05 accelerometer. The floor failed the specification on the vertical axis while the DVIA-P4000 passed on all three axes. Z, X and Y axis VC Curves are published.