Skip to main content
Installation Report
DVIA-P Series
05-21-2026

Tier-1 Semiconductor Hwaseong NRD AIMS 1x DVIA-P4000 Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
ZEISS
AIMS 1x
DVIA-P4000

Contents

Overview

Compared to the previous visit tuning, vibration levels have worsened.

A follow-up visit is planned to confirm that the isolator operates and performs normally with the Zeiss equipment turned off.

System Information

Model: DVIA-P4000

Serial Number: 220804R2

Engineer

Youngha Lee from DAEIL SYSTEMS

Tuning date: 23.09.20; Report written date: 23.09.21; Date of business trip: 17.12.27~17.12.29

Inspection and Tuning Date

September 21, 2023

Installation Site

Tier-1 Semiconductor NRD Line 3F, Hwaseong

Equipment

AlMs 1x

Summary of Vibration Results

Measurement PointZ-axis (Vertical) 1-10 HzZ-axis (Vertical) 10-80 HzX-axis (Left to Right) 1-10 HzX-axis (Left to Right) 10-80 HzY-axis (Front to Back) 1-10 HzY-axis (Front to Back) 10-80 Hz
FloorGDDDDC
ActiveECDCDB

Data and Image

Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date05-21-2026
Tags
DVIA-P Series
Installation Report
Tier-1 Semiconductor
ZEISS
AIMS 1x
DVIA-P4000

Related Case Studies

Tier-1 Semiconductor Hwaseong NRD AIMS 1x DVIA-P4000 (190724R2) Installation Report
DVIA-P Series

Tier-1 Semiconductor Hwaseong NRD AIMS 1x DVIA-P4000 (190724R2) Installation Report

05-21-2026Read more
Tier-1 Semiconductor Hwaseong ZEISS AIMS™ 1X-193i DVIA-P4000 (034014B) Installation Report
DVIA-P Series

Tier-1 Semiconductor Hwaseong ZEISS AIMS™ 1X-193i DVIA-P4000 (034014B) Installation Report

10-23-2025Read more
Tier-1 Semiconductor Giheung SR1 ZEISS AIMS 1X DVIA-P4000 (190104R4) Inspection Report
DVIA-P Series

Tier-1 Semiconductor Giheung SR1 ZEISS AIMS 1X DVIA-P4000 (190104R4) Inspection Report

12-22-2023Read more