Vibration Isolation Case Studies

Tier-1 Semiconductor Advanced Institute SAIT Cleanroom Building A Suwon Aligner MA-200C DVIA-P2200 inspection report: operation check and vibration measurement with equipment IDLE. Transmissibility and VC curves by axis.

DVIA-P4000 (serial 180306R4) inspection at Tier-1 Semiconductor Hwasung NRD line 8F with ZEISS AIMs 32. Compares AIMs IDLE vs power-off transmissibility and VC curves by axis, displacement/accelerometer sensor graphs, and vibration summary tables.

DVIA-P4000 (serial 190724R2) at Tier-1 Semiconductor Hwasung V1 Line 3F with Advantest E5610. Compact installation report with axis VC curves and transmissibility plots; Reference uses the Generic Vibration Criteria markdown table only.

DVIA-P4000 (serial 190724R2) installation report at Tier-1 Semiconductor NRD Line 3F, Hwaseong with AIMS 1x. Publishes vibration summary (Floor/Active VC bands), axis VC curves (Top/Floor), transmissibility graph, and Generic Vibration Criteria as the standard markdown table.

DVIA-P4000 (serial 220126R3) at Tier-1 Semiconductor Hwaseong V1 Line 10F with Hitachi CG6300. Tuning May 27, 2022; engineer Youngha Lee. Summary VC-band letters and per-axis VC curves (floor vs active isolator) from the installation report.

DVIA-P4000 (serial 220126R3) installation report with Hitachi CG6300. Tuning May 27, 2022; VC summary table and Z/X/Y floor vs active-isolation VC curves. Reference uses the standard Generic Vibration Criteria markdown table (no reference raster).