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Installation Report
DVIA-P Series
05-21-2026

Tier-1 Semiconductor Hwaseong NRD Line AlMs 1x DVIA-P4000 (220804R2) Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
Hwaseong
AlMs 1x
DVIA-P4000
220804R2

Contents

Overview

The DVIA-P4000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-P4000

Serial Number: 220804R2

Engineer

Youngha Lee from DAEIL SYSTEMS

Tuning Date

September 16, 2022

Location

Tier-1 Semiconductor Hwaseong NRD Line 3F

Equipment

AlMs 1x

Summary of Vibration Results

Measurement PointZ-axis (Vertical) 1-10 HzZ-axis (Vertical) 10-80 HzX-axis (Left to Right) 1-10 HzX-axis (Left to Right) 10-80 HzY-axis (Front to Back) 1-10 HzY-axis (Front to Back) 10-80 Hz
FloorFCEDDC
ActiveEEFEED

Data and Image

Vertical VC Curves

Vertical Transmissibility

Left to Right VC Curves

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date05-21-2026
Tags
DVIA-P Series
Installation Report
Tier-1 Semiconductor
Hwaseong
AlMs 1x
DVIA-P4000
220804R2

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