Vibration Isolation Case Studies

DVIA-P2200 (serial 230518R9) installation report at ETRI Daejeon C/R 1F: pre-installation first test on July 28, 2023. Published figures include vertical, left-to-right, and front-to-back VC curves and transmissibility graph.

DVIA-P2200 (serial 230518R9) installation report at ETRI C/R 1F Daejeon for JEOL JBX-8100FS. Tuning September 28, 2023; engineer Youngha Lee. Published figures: Z/X/Y VC curves only. Reference uses the standard Generic Vibration Criteria markdown table.

Tier-1 Semiconductor Giheung 5Line C/R SIX-3001 micro focus X-ray inspection system DVIA-P7000 installation report (December 2023 tuning). Publishes Z/X/Y transmissibility and VC curves; Y-axis transmissibility was not captured in the source report.

Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 3F Bruker nm-VI DVIA-P4000 Installation Report

GIS DHM demonstration equipment DVIA-P1000 (serial 231108R2) installation report at Guil Solution factory research laboratory—IDLE, Motor On, and Stage On measurement states with VC curves, autospectra, transmissibility (where measured), and measurement summary tables.

DVIA-P2200 (serial 240304R5) installation report for a JEOL JBX-8100FS electron beam lithography system at Korea Nanotech Institute 2F Nano Resource/Pattern Support Line, Gwanggyo. SET-UP, tuning, and vibration measurement on July 1, 2024 with equipment Turned off; engineer Chaewon Lee (DAEIL SYSTEMS). Published figures: equipment vibration specification diagram and per-axis VC, Narrowband, and Transmissibility plots. Reference uses the Generic Vibration Criteria markdown table only.