DVIA-ML Series
Active Control.Absolute Stillness.
90% vibration isolation at 1 Hz in 6 Degrees of Freedom. Engineered for electron microscopes that image at the nano scale.90% vibration isolation at 1 Hz in 6 Degrees of Freedom. Engineered for electron microscopes that image at the nano scale.
Your electron microscope deserves zero disturbance.
The DVIA-ML doesn't just reduce vibration. It eliminates it. Advanced sensors detect floor disturbances as low as 0.3 Hz. Adaptive algorithms respond in 0.5 ms. And electromagnetic actuators generate the exact opposing force so your imaging stays flawless, every time.The DVIA-ML doesn't just reduce vibration. It eliminates it. Advanced sensors detect floor disturbances as low as 0.3 Hz. Adaptive algorithms respond in 0.5 ms. And electromagnetic actuators generate the exact opposing force so your imaging stays flawless, every time.
Engineered for the world's most demanding instruments.Engineered for the world's
most demanding instruments.
The DVIA-ML series delivers VC-B to VC-G vibration criteria across all four supported metrology domains. Every application demands a different isolation strategy — the DVIA-ML series adapts to each.The DVIA-ML series delivers VC-B to VC-G vibration criteria across all four supported metrology domains.
Every application demands a different isolation strategy — the DVIA-ML series adapts to each.
SEM
Scanning Electron Microscopy
Nano-surface imaging without drift
Floor vibrations cause image drift and blur at magnifications above 50,000×. The DVIA-ML cancels disturbances from 0.5 Hz, keeping electron beams precisely on target for artifact-free SEM imaging.Floor vibrations cause image drift and blur at magnifications above 50,000×. The DVIA-ML cancels disturbances from 0.5 Hz, keeping electron beams precisely on target for artifact-free SEM imaging.
Supported Manufacturers
Thermo Fisher · Zeiss · JEOL · Tescan · Hitachi · CIQTEK
TEM
Transmission Electron Microscopy
Atomic resolution. Zero mechanical noise
HRTEM and STEM modes demand sub-angstrom stability. Building vibrations — even imperceptible ones — destroy lattice fringe contrast. The DVIA-ML provides the mechanical silence these instruments require.HRTEM and STEM modes demand sub-angstrom stability. Building vibrations — even imperceptible ones — destroy lattice fringe contrast. The DVIA-ML provides the mechanical silence these instruments require.
Supported Manufacturers
Thermo Fisher · JEOL · Hitachi · Tescan · CIQTEK
XRM
X-Ray Metrology
Precision diffraction. Clean peaks
X-ray diffraction, reflectometry, and fluorescence all require vibration-free sample positioning. The low-frequency vibrations broaden diffraction peaks and distort thin-film measurements. The DVIA-ML restores data integrity.X-ray diffraction, reflectometry, and fluorescence all require vibration-free sample positioning. The low-frequency vibrations broaden diffraction peaks and distort thin-film measurements. The DVIA-ML restores data integrity.
Supported Manufacturers
Bruker · Zeiss
EBL
Electron Beam Lithography
Precision lithography. Flawless patterns.
Electron beam lithography requires vibration-free sample positioning. Micro-vibrations cause beam drift, increasing line-edge roughness and distorting nanoscale patterns. The DVIA-ML ensures exact pattern transfer and pattering integrity.Electron beam lithography requires vibration-free sample positioning. Micro-vibrations cause beam drift, increasing line-edge roughness and distorting nanoscale patterns. The DVIA-ML ensures exact pattern transfer and pattering integrity.
Supported Manufacturers
Raith · JEOL
NMR
NMR Spectroscopy
Magnets protected. Spectra preserved
Superconducting magnets at 600–1200 MHz are hypersensitive to building vibrations. Floor motion degrades shim stability and spectral resolution. The DVIA-ML isolates the entire magnet assembly from floor vibration at all frequencies.Superconducting magnets at 600–1200 MHz are hypersensitive to building vibrations. Floor motion degrades shim stability and spectral resolution. The DVIA-ML isolates the entire magnet assembly from floor vibration at all frequencies.
Supported Manufacturers
Bruker · Jeol
DVIA-ML Installation Guide
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Feedback corrects. Feedforward anticipates.
Feedback measures vibration on the isolated mass and counters it in real time. Feedforward reads the floor and cancels disturbances before they arrive. Together, they deliver exceptional low-frequency isolation. Your instruments operate as if the vibration doesn't exist.
How it works
Passive Isolation (Spring & Damper):
Without active controls, the spring (k) and damper try to absorb shocks. However, at low frequencies, they can actually amplify the floor disturbance (d), causing the mass to resonate.
Feedforward Control:
Leverages ground sensor data to proactively command the actuators, nullifying floor vibrations before they reach the isolated mass.
Feedback Control:
Continuously measures the isolated mass's residual vibration (y) and uses the actuators to counteract it in real time.
Together, these advanced control mechanisms significantly enhance isolation performance, keeping the mass nearly perfectly still!
System Controls
Toggle to observe how feedback and feedforward mechanisms counteract low-frequency floor vibrations.
Floor Disturbance
Simulate low-frequency vibration
Feedforward Control
Proactive floor sensing
Feedback Control
Reactive mass correction
Outperforms. Everything.
Isolation from 0.5 Hz.
User Interface. Monitor. Log. Verify data.User Interface.
Monitor. Log. Verify data.
The DVIA-ML UI displays real-time vibration levels, actuator response, and sensor output across all six axes. Every data can be automatically logged. Review historical trends, export reports, or verify isolation performance at any time. No hidden processes. No black-box algorithms. Your facility team sees exactly what the system is doing, why it's responding, and how it's performing against specification.
Transmissibility Curve
Auto Spectrum
VC Curves
Sensors and Actuators
Your microscope. Your platform.
Every electron microscope is different. The DVIA-ML is engineered to match yours. We review your instrument specifications, floor conditions, and facility constraints. Dimensions, weight distribution, mounting interfaces, load paths, and cable routing are configured before manufacturing begins. No on-site modifications. No compromises to isolation performance.Every electron microscope is different. The DVIA-ML is engineered to match yours.
We review your instrument specifications, floor conditions, and facility constraints. Dimensions, weight distribution, mounting interfaces, load paths, and cable routing are configured before manufacturing begins. No on-site modifications. No compromises to isolation performance.
Glacios 2
Thermo Fisher Scientific
Tecnai TF20
Thermo Fisher Scientific
Krios G4
Thermo Fisher Scientific
Spectra
Thermo Fisher Scientific
Specifications
| Model | DVIA-ML1000 | DVIA-ML3000 |
|---|---|---|
| Dimensions | Customizable | |
| Maximum Load Capacity | 1700kg | 3000kg |
| Vibration Isolation Technology | Feedback and Feedforward Control | |
| Degrees of Freedom | 6 (X, Y, Z, θx, θy, θz) | |
| Active Isolation Bandwidth | 0.5 – 200 Hz | |
| Vibration Isolation | 80 – 90% at 1 Hz | |
| Actuator | Electromagnetic Actuator | |
| Maximum Actuator Force | Vertical 40 N, Horizontal 20 N | |
| Vibration Sensor | Geophone, Sensitivity: 2.55 V/in/s (100.4 V/m/s) ± 10% | |
| Leveling Repeatability | Repeatability: ± 0.1 mm | |
| Controller | Built-in | |
| Environmental Protection | CE and TUV | |
| Power Requirements | Line Voltage: 100 – 260V AC, Line Frequency: 50/60 Hz | |
| Air Requirements | Air Pressure: 4 – 6 bar, Air Delivery: 10 L/min | |
| Environmental Requirements | Temperature: 5 – 50 °C, Humidity: 20 – 90 % | |
Case Studies
Proven in the field. Installed in the world's most advanced semiconductor, aerospace, and research facilities. Every system measured and verified on-site.Proven in the field. Installed in the world's most advanced semiconductor, aerospace, and research facilities.
Every system measured and verified on-site.
YIMO BYD Semiconductor ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (240314R6) Installation Report
DVIA-M1000 installation report — ZEISS FIB-SEM Crossbeam 550 (serial 240314R6) for BYD Semiconductor in Chengdu, China. Overview states the platform is appropriately installed and functioning as intended. The published form has no separate vibration specification section or measurement summary table. Equipment condition: The equipment is installed. Tuning request as UI-program capture; vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
Shenghe Jingwei ZEISS Crossbeam 350 FIB-SEM DVIA-M1000 (240409R2) Installation Report
DVIA-M1000 installation report — ZEISS FIB-SEM Crossbeam 350 (serial 240409R2) for Shenghe Jingwei in Jiangyin, China. Overview states the platform is appropriately installed and functioning as intended. The published form has no separate vibration specification section or measurement summary table. Equipment condition: The equipment is installed/IDLE. Tuning request as UI-program capture; vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
YIMO ZEISS FIB-SEM Crossbeam 550 DVIA-M1000 (240417R5) Installation Report
DVIA-M1000 installation report — ZEISS FIB-SEM Crossbeam 550 (serial 240417R5), YIMO field package. Overview states the platform is appropriately installed and functioning as intended. End user and installation location are not filled on the published form (N/A). Equipment condition: The equipment is installed. Published figures: UI-program Transmissibility (vertical, left-to-right, front-to-back) and on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table (no separate reference graphic). The published handout has no Tuning Request section or separate vibration specification section.
YIMO Changshu Tenglong Special Steel Thermo Fisher Scientific Apreo 2C SEM DVIA-M1000 (240501R9) Installation Report
DVIA-M1000 installation report (serial 240501R9) for Changshu Tenglong Special Steel in Changshu, China, via YIMO. Overview states the platform is appropriately installed and functioning as intended. Thermo Fisher SEM Apreo 2C; the published form has no separate vibration specification section or measurement summary table. Equipment condition: The equipment is installed / IDLE. Tuning request UI capture; vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table (no separate reference graphic).
YIMO Naura Nanchang Hitachi SU8600 DVIA-ML1000 (240513R2) Installation Report
DVIA-ML1000 installation report (serial 240513R2) for Hitachi SU8600 FE-SEM via YIMO, Nanchang, for Naura Microelectronicst.
NM-TECH Moscow Thermo Fisher Helios Nanolab 450 DVIA-ML1000 (240719R3-2) Installation Report
DVIA-ML1000 installation report (serial 240719R3-2) for Thermo Fisher Helios Nanolab 450 FIB-SEM at NM-TECH, Moscow Zelenograd.