Vibration Isolation Case Studies

DVIA-UB700 (S/N 220811R2, 910×1140×143H) installation report prepared for TechnoPark(Ulsan) with ZEISS SEM EVO10; engineer Seounghoon Cheon. Tuning date 22.11.01 and report written date 22.11.03 per worksheet. Summary VC-class table (Floor vs Active) and nine Data and Image plots measured with equipment turned off—floor/top VC curves and transmissibility for Z/X/Y; decorative header bitmap (image1) and Reference VC diagram (image11) omitted in favor of the published markdown criteria table.

DVIA-UB700 (S/N 221024R4, 910×1140×139H mm) installation report for ZEISS SEM Sigma 300 at Hanyang University, Seoul — tuned 2022-12-15 by Seounghoon Cheon (DAEIL SYSTEMS), reported 2022-12-19. Measurement with Data Physics Quattro / SignalCalc ACE; FFT 0–80 Hz, Hanning / 800 lines. VC summary (equipment off): Floor vs Active across Z/X/Y bands as in the Summary of Vibration Results table. Publishes equipment-off Floor / Top VC and Transmissibility plots (nine figures). Decorative cover header bitmap omitted; ISO/VC reference chart replaced with markdown table.

DVIA-ULF700 (serial 250708R1-1) tuning and vibration measurement at a Tier-1 Semiconductor 2F clean booth with self-made customer equipment (equipment model field "-"). Measurement on November 4, 2025; report written November 4, 2025 on the cover block. Equipment Turned on/IDLE with a rotary pump operating on the platform top. Publishes Data Physics DAQ and UI Program measurement summary tables plus paired VC, autospectrum, and transmissibility plots for three axes. Reference VC criteria as a markdown table only.

DVIA-ULF1500 (serial 260223R2) tuning and vibration measurement at a Tier-1 Semiconductor DSR C Tower 3F research laboratory for ZEISS Xradia Versa 730 X-ray Microscope (equipment spec VC-C). Measurement on 2026-05-07 with equipment 장비 설치 및 Turned off; report written 2026-05-14. Nine-axis VC / autospectrum / transmissibility plots with PASS/FAIL measurement summary vs VC-C spec. Reference VC criteria as markdown table only.

Tier-1 Semiconductor Suwon SAIT Cleanroom Building A: DVIA-P7000 (140416R6-1) inspection with Nikon NSR-2205i12D stepper in IDLE state. Summary VC table, transmissibility plots, and April 2023 Turn-off comparison curves.

DVIA-P2200 (serial 140416R6-4) inspection and vibration measurement at Tier-1 Semiconductor Advanced Institute SAIT Cleanroom Building A, Suwon, with CDSEM S-9220T in IDLE state (December 12, 2023). Publishes sensor checks, axis transmissibility and VC curves including 21.12.15 comparison plots; Reference uses the Generic Vibration Criteria markdown table only.