Tier-1 Semiconductor Advantest E5610 DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

Advantest

E5610

DVIA-P4000

Overview

The DVIA-P4000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-P4000

Serial Number: 190724R2

Doohyun Kim from DAEIL SYSTEMS

Prepared by: Youngha Lee (Tuning date: 21.05.13; Report written date: 21.05.14; Date of business trip: 17.12.27~17.12.29)

May 13, 2020

Tier-1 Semiconductor V1 Line 3F, Hwasung

Advantest E5610

DAQ System: B*K PULSE 22 & LAN-XI Type 3056

Accelerometer: PCB PIEZOTRONICS 393B05

N/A

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A