Vibration Isolation Case Studies

DVIA-P7000 (serial 230825R1) vibration measurement at Tier-1 Semiconductor Giheung 5Line cleanroom—SIX-3001 micro focus X-ray inspection system. VC curves on the isolator and at three on-tool spots (equipment Turn on). Reference VC criteria published as a markdown table only.

DVIA-M1000 abbreviated worksheet (serial 230904R1). Setup dated 23.12.27 and reporting dated 23.12.28; measurement date 2023.12.27 (Wednesday) in Guangzhou with operator Sangjae Lee from DAEIL SYSTEMS. END USER Guangzhou Govisionox Technology Co., Ltd.; target equipment Helios 5 PFIB Cxe and installation site Guangzhou as in the form. The Overview states the standard DVIA-M1000 sentence plus measurement metadata. No vibration specification, equipment status, tuning request, measurement summary table, or Reference section appears in the source. The internal-program section title reads “M1000 internal program performance measurement result”; published figures are three plots labeled Z axis, X axis, and Y axis. Decorative header graphics from the Word file are omitted from public copy.

DVIA-MB3000 (serial 231005R2) installation report dated 27 December 2023 at Tier-1 Semiconductor with ZEISS Xradia 620 Versa X-ray Microscope: Summary of vibration results table (Floor vs Active VC curve grades across axis bands), VC curves for Floor and Active states per axis, and Reference diagrams with explanatory notes comparing VC curves and Modified Mercalli intensity. Engineer Jongwon Park (DAEIL SYSTEMS); tuning date and report written date 23.12.27.

Tier-1 Semiconductor Giheung SR1 ZEISS AIMS 1X DVIA-P4000 (190104R4) inspection report comparing equipment IDLE and power-off vibration and transmissibility.

Tier-1 Semiconductor Giheung SR1 Bruker AFM NM-VI DVIA-P4000 inspection report (serial 200805R3)

IST-format handout — DVIA-M1000 serial 230927R4 with ZEISS FE-SEM Gemini 560 at Shanghai (setup 2023-12-18, report written 2023-12-19). Published figures from the IST document: bench installation photograph and M1000 UI results for Z, X, and Y axes.