Vibration Isolation Case Studies

Tier-1 Semiconductor Advanced Institute SAIT Cleanroom Building A: DVIA-P7000 (140416R6-2) inspection on Nikon NSR-2205i12D stepper with IDLE-state vibration measurement, VC summary, transmissibility, and sensor checks.

SHOWA-format inspection and vibration measurement report (inspection December 14, 2023; written December 18, 2023) for VAAV-4000H serial 036174 (SAC-07) at Tier-1 Semiconductor Hwaseong NRD Line 8F with Bruker AFM NM-4. Publishes VC summary table (Floor vs Active), displacement and accelerometer graphs, axis transmissibility and VC curves, regulator and unit photographs from the source document.

Inspection and vibration measurement report (inspection December 14, 2023; written December 18, 2023) for DVIA-P4000 serial 039887B (SAC-07) at Tier-1 Semiconductor Hwaseong NRD Line 3F with Bruker LA-02. Publishes Floor vs Active VC summary table, displacement and accelerometer graphs, and axis transmissibility and VC curves from the source document.

CESI Beijing — Thermo Fisher Scios 2 DualBeam on DVIA-M1000 (220321R6): site tables, set-up photograph, and M1000 internal-program Z / X / Y performance captures.

DVIA-M1000 serial 230908R3-1 — Tianjin University, Thermo Fisher Scientific ESEM Quattro110. Handout covers set-up on 2023.12.13 with internal-program performance plots for Z, X, and Y axes; equipment/site photo after the title block (cover logo omitted from publication).

DVIA-P2200 (140416R6-6) inspection and vibration measurement at Tier-1 Semiconductor Advanced Institute SAIT Cleanroom Building A, Suwon, with EVG 6200 aligner (IDLE). Published figures: installation site, sensor checks, axis transmissibility and VC curves (including 21.12.15 comparison), and grating-contact issue photo.