Tier-1 Semiconductor Giheung SR1 ZEISS AIMS 1X DVIA-P4000 (190104R4) Inspection Report
Contents
Overview
Inspection was performed on two DVIA-P units installed at Tier-1 Semiconductor Giheung site upon request.
Daeil UI Program transmissibility and vibration measurement results show normal performance.
Equipment on/off state comparison inspection shows the effect of equipment IDLE-state vibration.
System Information
Model: DVIA-P4000
Serial Number: 190104R4
Serial Number (SAC-07): 038305A
Engineer
Youngha Lee, Jongwon Park from DAEIL SYSTEMS
Inspection Date
December 20, 2023
Report Written Date
December 22, 2023
Date of Business Trip
December 27–29, 2017
Location
Tier-1 Semiconductor SR1 line, Giheung
End User
Tier-1 Semiconductor
Equipment
ZEISS AIMS 1X
Summary of Vibration Results
AIMs IDLE Condition
| Measurement Point | Z-axis (Vertical) 1-10 Hz | Z-axis (Vertical) 12.5-80 Hz | X-axis (Left to Right) 1-10 Hz | X-axis (Left to Right) 12.5-80 Hz | Y-axis (Front to Back) 1-10 Hz | Y-axis (Front to Back) 12.5-80 Hz |
|---|---|---|---|---|---|---|
| Floor | D | D | D | E | D | D |
| Active | D | B | D | C | D | A |
When the equipment is in IDLE state, amplification occurs mainly in the 10–15 Hz and 20–40 Hz bands.
AIMs Power off
| Measurement Point | Z-axis (Vertical) 1-10 Hz | Z-axis (Vertical) 12.5-80 Hz | X-axis (Left to Right) 1-10 Hz | X-axis (Left to Right) 12.5-80 Hz | Y-axis (Front to Back) 1-10 Hz | Y-axis (Front to Back) 12.5-80 Hz |
|---|---|---|---|---|---|---|
| Floor | D | D | D | E | D | D |
| Active | E | E | E | E | E | E |
When the equipment is in Power off state, ground vibration is attenuated in all bands.
Data and Image
Z-axis (Vertical) Transmissibility (AIMs Power on)
Z-axis (Vertical) Transmissibility (AIMs Power off)
Z-axis (Vertical) VC curves (AIMs Power on)
Z-axis (Vertical) VC curves (AIMs Power off)
X-axis (Left to Right) Transmissibility (AIMs Power on)
X-axis (Left to Right) Transmissibility (AIMs Power off)
X-axis (Left to Right) VC curves (AIMs Power on)
X-axis (Left to Right) VC curves (AIMs Power off)
Y-axis (Front to Back) Transmissibility (AIMs Power on)
Y-axis (Front to Back) Transmissibility (AIMs Power off)
Y-axis (Front to Back) VC curves (AIMs Power on)
Y-axis (Front to Back) VC curves (AIMs Power off)
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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