Tier-1 Semiconductor Giheung SR1 Bruker AFM NM-VI DVIA-P4000 Inspection Report

Inspection was performed at the Tier-1 Semiconductor Giheung site in response to a request to inspect two installed DVIA-P units.

Daeil UI Program Transmissibility review shows normal performance.

Vibration measurement results show elevated top-plate vibration levels due to equipment IDLE-state vibration.

For accurate inspection, inspection and tuning with the equipment turned off are required.

Tier-1 Semiconductor

Model: DVIA-P4000

Serial Number: 200805R3

Serial Number (SAC-07): 038847B

Youngha Lee, Jongwon Park from DAEIL SYSTEMS

December 20, 2023

Report written date: December 22, 2023

Date of business trip: December 27–29, 2017

Tier-1 Semiconductor SR1 line, Giheung

Bruker AFM NM-VI(NM-6)

Vibration measurement was performed with the upper equipment in IDLE state.

Z-axis: attenuation is relatively low in the 10–30 Hz band; this is attributed to IDLE-state equipment vibration.

X-axis: in the 15–40 Hz band, top-plate high-frequency vibration exceeds the floor due to IDLE-state equipment vibration.

Y-axis: in the 6–10 Hz and 30 Hz bands, top-plate high-frequency vibration exceeds the floor due to IDLE-state equipment vibration.

For accurate isolator performance evaluation, vibration measurement and tuning with the upper equipment turned off are required.

Displacement Sensor Graph

Accelerometer and displacement sensors sense vibration changes correctly and operate normally.

With floor excitation, the Daeil UI Program Active Transmissibility graph shows attenuation of −10 dB or more from 3 Hz.

A resonance peak rising to 10 dB at 4.5 Hz is present but is attributed to IDLE-state equipment vibration.

In the 1–7 Hz low-frequency band, vibration is below VC-G and proportional-motion behavior yields lower attenuation.

In the 10–30 Hz band, attenuation is relatively low; compared with the UI Program graph, operation is correct and this is attributed to IDLE-state equipment vibration.

For accurate isolator performance evaluation, vibration measurement with the upper equipment turned off is required.

The Daeil UI Program Active Transmissibility graph shows attenuation at or below 0 dB from 5 Hz.

Resonance peaks rising to 0 dB at 10, 18, 24, 27, and 36 Hz may be IDLE-state vibration; horizontal-axis excitation is not available to confirm.

For accurate isolator performance evaluation, inspection with the upper equipment turned off is required; additional tuning may improve performance.

Vibration attenuation is observed in the 1–10 Hz band.

In the 15–40 Hz band, top-plate vibration exceeds floor vibration.

Resonance peaks in the UI Program Transmissibility graph indicate IDLE-state equipment vibration.

For accurate isolator performance evaluation, vibration measurement with the upper equipment turned off is required.

The Daeil UI Program Active Transmissibility graph shows attenuation of −10 dB or more from 3 Hz.

Resonance peaks rising to 0 dB at 12 and 32 Hz may be IDLE-state vibration; horizontal-axis excitation is not available to confirm.

For accurate isolator performance evaluation, inspection with the upper equipment turned off is required; additional tuning may improve performance.

Vibration attenuation occurs in the 1–6 Hz band. In the 6–10 Hz and 30 Hz bands, top-plate vibration exceeds floor vibration.

Resonance peaks in the UI Program Transmissibility graph indicate IDLE-state equipment vibration.

For accurate isolator performance evaluation, vibration measurement with the upper equipment turned off is required.