Tier-1 Semiconductor 2F Clean Booth DVIA-ULF700 (250708R1-1) Installation Report
Contents
Overview
Tuning and vibration measurements were conducted for the DVIA-ULF700 installed in the Tier-1 Semiconductor 2F clean booth.
Tuning and vibration measurements were conducted with the equipment in Turned on/IDLE state.
A rotary pump connected to the equipment on top of the vibration isolation platform was operating. This may affect tuning and vibration measurements.
Measured data are presented as VC curves, and reference materials on vibration levels are provided.
Vibration isolation platform
Model: DVIA-ULF700
Serial Number: 250708R1-1
Engineer
Chaewon Lee — Field Engineer, DAEIL SYSTEMS Co., Ltd.
Tuning date
November 4, 2025
Installation site
Tier-1 Semiconductor 2F clean booth
End User
Tier-1 Semiconductor
Customer equipment
Manufacturer: Tier-1 Semiconductor
Equipment: -
Model: Self-made
Equipment specification
-
Equipment status
장비 설치 및 Turned on/IDLE
Measuring equipment
10.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration measurement setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
Except for specific Hz affected by the rotary pump, VC-F through VC-G level vibration was observed.
Measurement summary
Obtained via Data Physics DAQ
| Measurement site | Measurement point | Equipment status | Axis | Floor vibration | DVIA-ULF700 |
|---|---|---|---|---|---|
| Tier-1 Semiconductor 2F clean booth | 1. Floor vibration 2. DVIA-ULF700 | Turned on/IDLE | Vertical | Residential Area @ 50 Hz | VC-F @ 50 Hz |
| Left to Right | VC-C @ 50 Hz | VC-G @ 50 Hz | |||
| Front to Back | VC-B @ 50 Hz | VC-G @ 50 Hz |
Obtained via UI Program
| Measurement site | Measurement point | Equipment status | Axis | Floor vibration | DVIA-ULF700 |
|---|---|---|---|---|---|
| Tier-1 Semiconductor 2F clean booth | 1. Floor vibration 2. DVIA-ULF700 | Turned on/IDLE | Vertical | VC-C @ 31.5 Hz | VC-E @ 31.5 Hz |
| Left to Right | VC-E @ 2 Hz | VC-G @ 2 Hz | |||
| Front to Back | VC-C @ 2 Hz | VC-F @ 2 Hz |
Data and image
Vertical VC Curves (Obtained via Data Physics DAQ)
Vertical VC Curves (Obtained via UI Program)
Vertical Autospectrum (Obtained via Data Physics DAQ)
Vertical Autospectrum (Obtained via UI Program)
Vertical Transmissibility (Obtained via Data Physics DAQ)
Vertical Transmissibility (Obtained via UI Program)
Left to Right VC Curves (Obtained via Data Physics DAQ)
Left to Right VC Curves (Obtained via UI Program)
Left to Right Autospectrum (Obtained via Data Physics DAQ)
Left to Right Autospectrum (Obtained via UI Program)
Left to Right Transmissibility (Obtained via Data Physics DAQ)
Left to Right Transmissibility (Obtained via UI Program)
Front to Back VC Curves (Obtained via Data Physics DAQ)
Front to Back VC Curves (Obtained via UI Program)
Front to Back Autospecturm (Obtained via Data Physics DAQ)
Front to Back Autospecturm (Obtained via UI Program)
Front to Back Transmissibility (Obtained via Data Physics DAQ)
Front to Back Transmissibility (Obtained via UI Program)
Generic vibration criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
Reference
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