Vibration Isolation Case Studies

Installation report for the DVIA-MB1000 (S/N 161117R3) supporting a SEMIRON 5000 SEM in Lab 506 at SERON Technologies, Uiwang. A performance check was followed by vibration measurement with the equipment in the IDLE state. On the floor all three axes measured at the VC-D level, while on the DVIA-MB1000 platform the vertical (Z), left-to-right (X) and front-to-back (Y) axes all reached VC-G, so no additional re-tuning was required. Per-axis Autospectrum and VC Curves plus the installation photo are published.

Installation report for the DVIA-MB1000 (S/N 170619R2) supporting a SEMIRON 5000 SEM in Lab 506 at SERON Technologies, Uiwang. The platform was inspected and the vibration environment re-measured with the equipment in the IDLE state. On the floor all three axes sat at the VC-D level, while on the DVIA-MB1000 the vertical (Z), left-to-right (X) and front-to-back (Y) axes all reached VC-G, so the system was cleared for continued operation without any re-tuning. Per-axis Autospectrum and VC Curves plus the installation photo are published.

DVIA-U1000 active vibration isolation platform (serial 241217R6) supporting a ZEISS EVO 10 SEM at End User Shanghai Fasteners and Welding Materials Technology Research Institute Co., Ltd. (上海紧焊所) in Shanghai, China, reported. This is the 2nd tuning trial on the same unit: the platform was retuned on 2026.08.04 and vibration was measured with the equipment in the Turned off state. Published figures are the Chinese-language tuning request work order (调试请求书), the per-axis transmissibility traces captured from the DAEIL UI program for Vertical (Z), Left to Right (X) and Front to Back (Y), and an installation photo of the EVO 10 seated on the DVIA-U Series platform. The source report contains no vibration specification section and no pass/fail measurement summary table, so none is shown here.

Yidong Optics SEM DVIA-ML1000 installation report (2nd tuning trial, tuned 2026.07.17) — at the Suzhou site for end user Yidong Optics Co., Ltd., the DVIA-ML1000 active vibration isolation platform was re-tuned and measured with the equipment in the IDLE state. The floor registered VC-D vertically, VC-F left to right and VC-E front to back, while the DVIA-ML1000 platform reached VC-G on all three axes. The tuning request work order (调试请求书), per-axis Autospectrum and VC Curves plots, and the installation photo are published.

DVIA-ULFB700 installation report (serial 260203R2) for a ZEISS Sigma 360 FE-SEM at End User Hubei University of Technology in Wuhan, China. Tuning on 2026.08.04 covered air pressure setting and per-axis control gain adjustment; vibration was then measured with the equipment Turned off, and both the floor and the DVIA-ULFB700 platform met the ZEISS vibration specification on all three axes (Vertical, Left to Right, Front to Back). Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and an installation photo of the installed Sigma 360.

Installation report for the DVID-C vibration isolation counter (serial 260415R2) supplied to Cosmo AM&T through Bruker Korea for a Bruker Contour X-500 optical profilometer. Vibration was measured on 5 August 2026 with the equipment installed and Turned on/IDLE, using a B&K Front End Type 3040-A-040 with a PCB 393B05 accelerometer. The floor already met VC-B, and on the DVID-C top plate the vertical (Z), left-to-right (X) and front-to-back (Y) axes all stayed below the VC-B criterion line with no peak exceeding it anywhere in the band, so every axis passed. Per-axis VC Curves and the IEST-RP-CC012.2 vibration criteria table are published.