Vibration Isolation Case Studies

ZEISS Sigma 360 FE-SEM DVIA-ML1000 installation report — the DVIA-ML1000 active vibration isolation platform was installed at Guangzhou for end user Resonac Electronic Materials, then re-tuned (2nd trial) and measured with the equipment Turned off. Against the Sigma 360 horizontal and vertical allowable vibration specification (mm/s² RMS, 1–100 Hz), the bare floor exceeded the limit on the vertical and front-to-back axes, while the DVIA-ML1000 platform passed on all three axes. The tuning request work order, the allowable vibration tables and the per-axis Autospectrum plots are published; no installation photographs were permitted at the site.

DVIA-ULF700 installation report (serial 260605R5) for a ZEISS Sigma360 FE-SEM at End User Inner Mongolia Xingfa Technology Co., Ltd. in Wuhai. Tuning was carried out on 2026.09.04 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. At the floor all three axes failed the specified criterion; on the DVIA-ULF700 all three axes (Vertical, Left to Right, Front to Back) satisfied the ZEISS specification, confirming that the isolator attenuates the ambient vibration. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and one installation photo.

Installation report for the measurement carried out on 3 September 2026 on the DVIF-FB-1000x2000x3000H vibration isolation platform (S/N 241001R5) in the 3rd floor cleanroom of the FST Osan plant, on which a LAZIN LODAS-B18 photomask blank inspection system is mounted. This is a separate visit that follows the top plate reinforcement verification of August 2026: the DVIF-FB top plate was re-measured at the customer's request to verify the reliability of the existing data, and the lower frame of the upper equipment was measured for the first time to obtain baseline data before Bilz pads are applied. Measurement was performed with the equipment in the IDLE state against a 25 µm/s RMS (VC-B) requirement in both the horizontal and vertical directions. The top plate reproduced the earlier result — PASS in the vertical (Z) and left to right (X) directions and FAIL in the front to back (Y) direction — while the upper equipment lower frame exceeded the specification on all three axes. Autospectrum and VC Curves are published for each axis at both measurement points.

Installation report and demo test for the DVIA-T78 (serial 260819S1) installed in the 1F laboratory of the P&T4 building at a Tier-1 Semiconductor Icheon campus, under an OLYMPUS MX63L microscope. The microscope had no formally defined allowable vibration specification, but image resolution degraded and visible shaking appeared during operation, and the passive isolation table in use was not enough. Two demo tests on the DVIA-T78 and two baseline measurements on the passive table were taken with a B&K Front End Type 3040-A-040 and a PCB 393B05 accelerometer in the IDLE state. On the active platform all three axes settled to the VC-D to VC-E range, and the microscope image shaking and noise disappeared completely. All 24 per-axis Autospectrum and VC Curves plots are published together with the IEST-RP-CC012.2 vibration criteria reference.

DVIA-ML1000 installation report (serial 260209R6) for a RAITH Electron Beam Lithography (Pioneer Two) installed at Hubei University of Technology, Wuhan. Tuning was carried out on 2026.08.25 and vibration was measured with the equipment in the Turned off state. The system provided effective attenuation across the frequency bands where meaningful floor vibration is present, and the site was confirmed suitable for equipment operation.

Hitachi High-Tech SU7000 SEM DVIA-ML1000 installation report — the DVIA-ML1000 active vibration isolation platform was installed at Fuzhou for end user Fujian University of Technology, then tuned and measured with the equipment in the IDLE state. Against the SU7000 horizontal and vertical allowable vibration specification (µm pk-pk, 1–10 Hz), the floor and the DVIA-ML1000 platform both passed on the vertical, left-to-right, and front-to-back axes. The tuning request work order, the allowable vibration tables, the per-axis Autospectrum plots and the installation photo are published.