Vibration Isolation Case Studies

Installation report (VOC 26-132) for the DVIA-P4000 vibration isolation system, serial 200805R3, installed under a Bruker AFM NM-VI6 on the 3rd floor of the V1 line (SR1 Building) at a Tier-1 Semiconductor Giheung site. Tuning date July 21, 2026; report written August 3, 2026. Site inspection and re-tuning were performed to resolve a recurring POS alarm on the isolator and to recover control margin under the payload loading condition. Measurement was made in the IDLE state against a 6.25 µm/s RMS (VC-D) specification from 1 to 100 Hz, using a B&K 3040-A-040 front end with Pulse Labshop 22 and a PCB 393B05 accelerometer. The floor failed the specification on the vertical axis while the DVIA-P4000 passed on all three axes. Z, X and Y axis VC Curves are published.

Hitachi High-Tech SU8600 FE-SEM DVIA-ML1000 installation report — following installation of the DVIA-ML1000 active vibration isolation platform at Wuxi, tuning and vibration measurement were performed with the equipment in the IDLE state. Measured against the horizontal and vertical allowable vibration specification, both the floor and the DVIA-ML1000 platform passed on the vertical, left-to-right, and front-to-back axes. The tuning request work-order form, per-axis Autospectrum plots, and the installation photo are published.

Yidon Technologies YF-1801 FE-SEM DVIA-ML1000 installation report — following installation at Suzhou for end user Yidong Optical Technology, the DVIA-ML1000 active vibration isolation platform was tuned and measured with the equipment in the IDLE state. Across the vertical, left-to-right, and front-to-back axes the DVIA-ML1000 platform reached VC-G on all three axes. The tuning request work-order form, per-axis Autospectrum and VC Curves plots, and the installation photo are published.

Tier-1 electronics component manufacturer Sejong P5 3F Clean Room BGA-PSP plating-thickness gauge DVIA-P2200 installation report — tuning and vibration measurement with the equipment installed and Turned off; VC-B specification met on all axes for both floor and the DVIA-P2200 platform.

DVIA-ML3000 (S/N 251125R4) installation report at Ansteel Iron and Steel Research Institute in Anshan, China — Thermo Scientific TEM Talos, supplied. Published figures: the tuning request work order and the vertical / left-to-right / front-to-back VC curves obtained via the UI program, plus the onsite installation photo. Vibration specification is 1.56 µm/s RMS horizontal and 3.12 µm/s RMS vertical over 1-100 Hz; the Measurement Summary cites See Section 9, with all three axes FAIL on the floor and PASS on the DVIA-ML3000 platform.

Installation report for the DVIA-P4000 vibration isolation system, serial 260204R5, installed beneath an Advantest DR-SEM (E5610) on the 3rd floor of the V1 line at a Tier-1 Semiconductor site in Hwaseong. Tuning and vibration measurement were carried out on 2026-07-22 with the equipment installed and turned on. The top plate of the isolation table met the required specification (1.0 µm p-p or less at 0.5~10 Hz, 0.1 or less at 10~25 Hz, 0.03 or less at 25~100 Hz) in all three axes, while the floor exceeded the specification in the vertical (Z-axis) and front-back (Y-axis) directions and was measured as Fail.