Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies
Youngil Precision Keyence VR-6000 DVIA-T67 DEMO Inspection Report
DVIA-T67 DEMO inspection and vibration report at Youngil Precision Ansan site 5F OQA room — Keyence VR-6000 3D profile measurement system. Tuning and vibration measurement with equipment Turned on/IDLE; intermittent fault analysis, VC-curve plots by axis, and Reference table.
ZEISS FE-SEM Sigma 360 DVIA-ULF700 Installation Report
DVIA-ULF700 (serial 251017R2) installation and vibration tuning with ZEISS FE-SEM Sigma 360 where End User and Location were not disclosed in the report (N/A). Includes vibration specification capture, VC / autospectrum / transmissibility plots, and VC reference table (no decorative header or EMF curve upload).
Tier-1 Semiconductor Fabrication Facility Giheung Tokyo Electron Precio XL DVIA-P4000 Installation Report
Tier-1 Semiconductor Fabrication Facility Giheung Tokyo Electron Precio XL Installation Report
Tier-1 Semiconductor Pyeongtaek P1 ZEISS Gemini SEM 460 DVIA-ML1000 Installation Report
Tier-1 Semiconductor Pyeongtaek P1 1F — ZEISS Gemini SEM 460 on DVIA-ML1000. Includes manufacturer equipment-vibration spec diagram, VC/Autospectrum/Transmissibility.
KIMM Self-made DVIA-P550 Installation Report
KIMM Self-made DVIA-P550 Installation Report
Covis Technology AID Robotics DVIA-ML1000S & DVIP-B Installation Report
AID Robotics 1F — DVIA-ML1000S and DVIP-B (SN 260108R1).