Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies

Hitachi SU3800 SEM DVIA-ML1000 (241016R4) Installation Report
DVIA-ML1000 installation report (serial 241016R4) for Hitachi SU3800 SEM. Overview states the platform is appropriately installed and functioning as intended. Prepared for and location are N/A on the form; measurement summary compares floor vs DVIA-ML1000 with equipment turned on/IDLE. Vibration specification is given as a diagram; tuning request N/A; UI-program VC, autospectrum, and transmissibility plots per axis; equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.

Semilab AFM-2000 DVIA-ULFB350 Installation Report
DVIA-ULFB350 (S/N 250414R2) active vibration isolation platform installation report for Semilab Automated AFM (AFM-2000). Vertical / Left-to-Right / Front-to-Back VC Curves, Autospectrum, and Transmissibility measured with equipment turned on/IDLE. All three axes achieve VC-G on the DVIA-ULFB350.
Tier-1 Semiconductor Icheon P&T PKG Analysis Lab DVIA-ULFB700 Installation Report
DVIA-ULFB700 (S/N 260211R2) installation report — Vertical, Left-to-Right, and Front-to-Back VC curves, Autospectrum, and Transmissibility (equipment turned off).

Gränges Aluminum Thermo Fisher Spectra 200 Cryo-STEM DVIA-ML3000 (250211R4-1) Installation Report
DVIA-ML3000 installation report (serial 250211R4-1) for Thermo Fisher Scientific Cryo-STEM Spectra 200 at Gränges Aluminum, Shanghai, China. Overview states the platform is appropriately installed and functioning as intended. Vibration specification as text table; tuning request N/A; measurement summary compares floor vs DVIA-ML3000 with equipment turned on/IDLE; UI-program VC, autospectrum, and transmissibility plots per axis; equipment photo; Reference uses the standard Generic Vibration Criteria markdown table only.

Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 Installation Report
TFS Helios 5 on DVIA-ML1000 (250904R2) — see report for HWL / VC spec summary.

QRT DVIA-ML3000 (251111R3) Installation Report — 2026.03.04
DVIA-ML3000 (serial 251111R3) at Korea Institute of Nano Technology, 1F QRT lab, for customer QRT, supporting a Thermo Fisher Scientific Cryo-TEM Spectra 200. Measurement date 26.03.04, report date 26.03.05; engineer 이채원. Tuning and measurement were performed with the customer equipment Turned on/IDLE. Data Physics QUATTRO DAQ with SignalCalc ACE and a PCB 393B05 accelerometer; VC / Autospectrum / Transmissibility plots for vertical, left-to-right, and front-to-back; equipment specification and seven installation photos as published figures; measurement summary table; Reference as a markdown Generic Vibration Criteria table.