Vibration Isolation Case Studies

DVIA-ULF700 installation report (serial 260827R1) for a ZEISS EVO 10 SEM at End User Hebei Hengke Vibration Damping Equipment Co., Ltd. in Hebei. Tuning was carried out on 2026.09.14 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. All three axes (Vertical, Left to Right, Front to Back) passed the specified vibration criterion at both measurement points, the floor and the DVIA-ULF700. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and one installation photo.

Tier-1 Semiconductor Cheonan (C3 line, 6th floor mass production quality team cleanroom) ZEISS Xradia 730 Versa X-ray microscope DVIA-ULF1500 installation report. After relocation and installation, tuning and vibration measurement were performed with the equipment powered on and active isolation running. At the central point between the two ULF modules the floor vibration was reduced within the VC-C grade on all axes. Per-axis VC Curves are published.

DVIA-ULF700 installation report (serial 260528R9) for a ZEISS FE-SEM Sigma360 at End User School of Life and Health Sciences, Hainan Normal University in Haikou. Tuning was carried out on 2026.09.11 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. All three axes (Vertical, Left to Right, Front to Back) passed the specified vibration criterion at both measurement points, the floor and the DVIA-ULF700.

DVIA-ML1000 installation report (serial 260622R4) for a TESCAN FIB-SEM SOLARIS X2 GMH installed at ASE Korea PB1, 1CMD QO Lab, Electron Microscopy Room. Tuning was carried out on 2026.09.11 and vibration was measured with the equipment in the IDLE state. All three axes met the reference specification and achieved a PASS rating, with the vertical axis improving from VC-B to VC-E, the left-to-right axis from VC-E to VC-G, and the front-to-back axis from VC-B to VC-F.

Installation report for the DVIA-T67 (serial 260402R1) installed for Pharrics BV in Leuven under an MPI Corporation MPI TS150 probe station. With no vibration specification defined, tuning and vibration measurements were performed with the probe station mounted on the system in the idle state. The results are presented as per-axis Autospectrum and VC Curve plots together with the IEST-RP-CC012.2 vibration criteria reference.

Installation report for the DVIA-TD45 (serial 260616R5) installed in the KimTechnix laboratory under a Keyence VK-X4000 laser scanning confocal microscope. Tuning and vibration measurements were performed under three conditions (desk vibration without the isolation platform, passive isolation, and active isolation) with the microscope in the Idle condition, and the final vibration level was measured within the VC-F grade in all axes.