Vibration Isolation Case Studies

DVIA-T56 re-tuning report (reference 260202R1-6) for a COXEM Tabletop SEM EM 40 at Shanghai Opotong Instruments Co., Ltd., Shanghai, China. Overview documents re-tuning due to active vibration oscillation. Vibration Specification shows N/A with the engineer explanatory note verbatim; tuning trial and tuning request match the report. Equipment condition wording is unchanged from the report. Measurement summary compares floor versus DVIA-T56 with equipment turned on. Measurement Data Obtained via UI Program publishes VC curves, Autospectrum, and Transmissibility for vertical, left-to-right, and front-to-back axes. Includes the equipment photograph from the reference report. Reference uses the standard Generic Vibration Criteria markdown table only (Word Reference EMF omitted). Decorative header imagery before the title block is omitted from the public page.

DVIA-ULF1000 (S/N 260415R5) tuning and vibration measurement at ASM Hwaseong Plant Building 1, 4F laboratory for a ZEISS FE-SEM GeminiSEM 560; tuning on May 11, 2026; report dated May 14, 2026. Equipment turned on/IDLE; measurement summary with floor and platform RMS per the report; vertical, left-to-right, and front-to-back VC curves, autospectra, and transmissibility; on-site installation photo. Decorative banner and reference EMF graphic omitted — Reference uses the standard VC markdown table.

Installation report for Thermo Fisher Scientific SEM (Helios model) on DVIA-ULF1000 (S/N 260320R1) at Beijing for Citic Metal; tuning 13 May 2026. Prepared for and End User both list Citic Metal—the public page omits a duplicate Prepared for block. Vibration specification is UI capture only; Measurement Summary uses the report’s eight-column RMS and PASS/FAIL layout. Publishes VC curves, Autospectrum, and Transmissibility for vertical, left-to-right, and front-to-back axes plus equipment photo; Reference is the standard Generic Vibration Criteria markdown table only (Word EMF omitted). Decorative header logo strip before the title block is not published.

DVIA-MB3000 (serial 240228R1) with Unisoku USM1400 STM at Mianyang Ninth Hospital. Tuning May 7, 2026; report written May 12, 2026. Vibration specification N/A; equipment turned on/IDLE; UI-program VC, Autospectrum, and Transmissibility per axis; equipment photo not permitted. Reference as Generic Vibration Criteria markdown table only.

DVIA-P4000 (serial 181106R6) inspection and vibration measurement report at a Tier-1 semiconductor advanced institute (Giheung, Building B, 1F cleanroom)—Hitachi CD-SEM CG4000, equipment Turned on/IDLE. Publishes equipment specification graphic, VC / autospectrum / transmissibility by axis, measurement summary table, and Generic Vibration Criteria as the standard markdown table (no VC reference raster).

Tier-1 Semiconductor Advanced Institute Building B 1F cleanroom laboratory DVIA-P2200 tuning and vibration measurement with JEOL JBX-8100FS electron beam lithography system. VC, autospectrum, and transmissibility by axis.