Installation Report

DVIA-ULF Series

05-13-2026

YIMO Thermo Fisher Scientific Helios SEM DVIA-ULF1000 Installation Report

DVIA-ULF Series

Installation Report

YIMO

Thermo Fisher Scientific

Helios

SEM

Citic Metal

DVIA-ULF1000

260320R1

Overview

The DVIA-ULF1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ULF1000

Serial Number: 260320R1

Engineer

Juhyeok Kim DAEIL SYSTEMS

Tuning Date

May 13, 2026

End User

Citic Metal

Number of Tuning Trial

1st

Location

Bejing

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: SEM

Model: Helios

Vibration Specification

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Summary

Measurement Point	Status	Orientation	Vibration Specification	Measurement value (RMS, μm/s)	Measurement value (RMS, μm/s)	Measurement result	Measurement result
				Floor vibration	DVIA-ULF1000	Floor vibration	DVIA-ULF1000
1.Floor 2.DVIA-ULF1000	Turned on/IDLE	Vertical	VC-F	VC-E @ 6.3 Hz	VC-G @ 6.3 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-G	VC-F @ 3.15 Hz	VC-G @ 3.15 Hz	✗ FAIL	✓ PASS
		Front to Back	VC-G	VC-E @ 2.5 Hz	VC-G @ 2.5 Hz	✗ FAIL	✓ PASS

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

12.Equipment picture

13. Reference

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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