Installation Report

DVIA-ULF Series

05-14-2026

ASM ZEISS GeminiSEM 560 DVIA-ULF1000 (260415R5) Installation Report

DVIA-ULF Series

Installation Report

ASM

ZEISS

GeminiSEM 560

DVIA-ULF1000

260415R5

Overview

Tuning and vibration measurement were performed on the DVIA-ULF1000 installed in the ASM Hwaseong Plant Building 1, 4F laboratory.

Inspection and vibration measurement were conducted with the equipment turned on/IDLE.

Data are presented as VC curves, with reference material for vibration levels.

Vibration Isolation System Information

Model: DVIA-ULF1000

Serial Number: 260415R5

Engineer

DAEIL SYSTEMS Field Engineer Chaewon Lee

Tuning Date

May 11, 2026

Installation Site

ASM Hwaseong Plant Building 1, 4F laboratory

End User

ASM

Customer Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: GeminiSEM 560

Equipment Specification

Horizontal:

up to 10 Hz: less than 5 µm/s rms

10 - 60 Hz: less than 10 µm/s rms

above 60 Hz: less than 14 µm/s rms

Vertical:

up to 10 Hz: less than 4 µm/s rms

10 - 60 Hz: less than 14 µm/s rms

above 60 Hz: less than 20 µm/s rms

Equipment Status

장비 설치 및 Turned on/IDLE

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

The vibration specification is met in all directions.

Measurement Data

Measuring Point	Status	Direction	Specification	Floor (RMS, µm/s)	DVIA-ULF1000 (RMS, µm/s)	Floor result	DVIA-ULF1000 result
ASM Hwaseong Plant Building 1, 4F laboratory 1. Floor vibration 2. DVIA-ULF1000	Turned on/IDLE	Vertical	Per item 8	10.3@ 58.9 Hz	0.201@ 58.9 Hz	✓ PASS	✓ PASS
		Left to Right		5.19@ 1.63 Hz	0.503@ 1.63 Hz	✗ FAIL	✓ PASS
		Front to Back		8.16@ 1.88 Hz	0.799@ 1.88 Hz	✗ FAIL	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Installation Photo

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

*Notes:*

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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