Vibration Isolation Case Studies

DVIA-T86 (serial 210818R3-2) installation report prepared for CIQTEK covering Heifei, China, tuning on May 21, 2023, and VC-curve summaries for Floor vs Active vibration at Z/X/Y axes. Report publishes Z-, X-, and Y-axis transmissibility and VC-curve plots (vertical, left–right, front–back) for the Experimental platform installation; DOCX decorative header raster is omitted from the public gallery.

JIANGSU — SU8600 on DVIA-ML1000 (SN 220629R1). Compact internal-program summary with Z / X / Y axis plots.

DVIA-P4000 (serial 221227R2) setup and vibration measurement at Hua Hong Semiconductor (Wuxi) for ASML eScan500. Setup 2023.03.22–23; report 2023.03.27. Summary VC-grade table (equipment off/on) and Z/X/Y octave-band velocity and acceleration RMS graphs.

Business trip report dated 2023.03.27 by Hosang Yu and Youngha Lee (2023.03.20–03.24): DVIA-T65(220210R1-1) limit-switch repair, transmissibility, and VC-class vibration measurement at Office (Wuxi); DVIF-FA-P4000-2800x1450x600H(221227R2) setup, feedforward tuning, resonance investigation, cable-routing mitigation, factory-test comparison, and multi-condition PULSE data at Tier-1 Semiconductor (Wuxi) with ASML eScan500 and IDE Active isolator stack. Conclusions and IDE ATAN module notes follow the source worksheet order.

DVIA-M1000 serial 221130R2 — worksheet for Carl Zeiss Suzhou Co.,Ltd, target equipment ZEISS EVO, installation and measurement in Suzhou. Overview and in-form metadata match the handout; MB1000 internal program performance screenshots are labeled Z axis, X axis, and Y axis. The header banner image in the Word file was decoration only and is not republished.

DVIA-U1000 worksheet for FUJIAN ZI JIN TONG BO, Axia ChemiSEM LoVac in FUJIAN, China (serial 220718R11). Setup 23.03.07, report 23.03.10 by Youngha Lee (DAEIL SYSTEMS). Publishes the setup photo under the source title line and Z/X/Y internal-program performance screenshots; omits narrow header bitmap image1.