Vibration Isolation Case Studies

DVIA-M3000 abbreviated worksheet for serial 210506R1 (source M3000_210506R1_23.04.17.docx). Target equipment cameca_ims-6f-e7 with END USER Zhonghuan Advanced Semiconductor Materials Co., Ltd.; installation place YIXING; setup and reporting dated 23.04.17 per the form; operator Lee, Young Ha; measurement dated 2023.04.17 (Monday); DVIA-M3000 overview sentence as printed. Internal-program plots use axis labels Z axis, X axis, and Y axis under the MB3000 internal program caption. Decorative bitmap embedded under the company header line was omitted from the public page.

DVIA-P7000 (140416R6) installation report at Tier-1 Semiconductor Advanced Institute Suwon for a NIKON stepper. Tuning April 14, 2023 by Youngha Lee (DAEIL SYSTEMS). Published figures: axis transmissibility, floor and active VC curves by axis, and required equipment vibration specification diagram. Reference uses the Generic Vibration Criteria markdown table only.

DVIA-M3000 abbreviated worksheet for serial 220126R7-2 (source M3000_220126R7-2_23.04.12.docx). Target equipment HITACHI SU8010 with END USER Sun Yat-sen University; installation place GUANGDONG; setup and reporting dated 23.04.12 and 23.04.19 per the form; operator Yu, Ho Sang; measurement dated 2023.04.12 (Wednesday) with DAEIL SYSTEMS, Hosang Yu. Overview sentence as printed. MB3000 internal program section publishes Z, X, and Y axis plots only; the small bitmap in the header title block was treated as decorative and omitted from the public page.

DVIA-M1000 abbreviated worksheet (serial 220718R10). Setup dated 23.04.04 and reporting dated 23.04.07; measurement date 2023.04.04 (Tuesday) in Xiamen with operator Youngha Lee from DAEIL SYSTEMS. END USER XIAMEN JIUMU YANFA; target equipment Apreo 2C HiVac and installation site Xiamen as in the form. The Overview block states the standard DVIA-M1000 sentence plus the measurement/session lines from the worksheet. No vibration specification, equipment status, tuning request, measurement summary table, or Reference section appears in the source. The internal-program section title in the source reads “MB1000 internal program performance measurement result”; published figures are three plots labeled Z axis, X axis, and Y axis. Decorative header graphics and the setup bitmap under the “Set up” line are omitted from public copy.

GRGT field report for Helios G5 CX in Shanghai. DVIA-M1000 (reference 221107R1): overview and MB1000 internal program performance plots for Z, X, and Y.

DVIA-UB700 installation worksheet (serial 221103R3) for Shanghai Shengjian Environmental System Technology Co., Ltd with Thermo Scientific Sigma 300 equipment in Shanghai, China. Tuning date 23.03.20, report written 23.04.06, business trip 17.12.27~17.12.29. Publication includes Z / X / Y-axis transmissibility plots and equipment photograph; decorative header bitmap (image1) omitted.