Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Omicron STM DVIA-MB1000 (230905R3) Installation Report — MB1000 internal program
DVIA-MB1000 compact installation handout (serial 230905R3) for an Omicron STM. The source lists END USER and installation/measurement locations as "-"; reporting matches setup on 23.11.23. Published captures are the MB1000 internal program Z/X/Y performance screens only; the Word source has no Reference / VC criteria appendix.

ARCHE Semilab AFM-2000 DVIA-UB350 (220621R1) Inspection Report
DVIA-UB350 (serial 220621R1) inspection report for Semilab AFM-2000 at ARCHE (147, Annyeong-gil, Byeongjeom-gu, Hwaseong-si). Tuning date 23.11.21; report 23.11.22. Idle-state and AFM-operation vibration summary tables, Z/X/Y transmissibility and VC-curve plots; Korean field notes on VC levels and suspected 60 Hz electrical noise on X during AFM. Decorative header graphic omitted; Reference uses the standard VC criteria markdown table only.

ARCHE Semilab AFM-2000 DVIA-UB350 Inspection Report
DVIA-UB350 (S/N 220621R1) active vibration isolation platform inspection report for Semilab AFM-2000 installed at ARCHE (147, Annyeong-gil, Byeongjeom-gu, Hwaseong-si, Gyeonggi-do). Z / X / Y-axis Transmissibility and VC-Curve measurements taken in idle state and with AFM in operation. All three axes achieve VC-G on the DVIA-UB350 in idle; X-axis shows suspected 60 Hz electrical noise during AFM operation.

Nanochip ZEISS GeminiSEM 300 DVIA-M1000 (220919R4-1) Installation Report
DVIA-M1000 abbreviated worksheet for serial 220919R4-1. Target equipment GeminiSEM 300 with END USER Nanochip; installation place Shanghai; setup and reporting dated 23.11.20 per the form; operator Park, Jongwon; measurement dated 2023.11.20 (Monday). Overview sentence as printed. Internal-program plots use axis labels Z axis, X axis, and Y axis under the M1000 internal program caption. Decorative bitmap embedded on the Nanochip header line was omitted from the public page.
Tier-1 Semiconductor Hwaseong NRD Line ZEISS AIMS 1x DVIA-P4000 (220804R2) Inspection Report
DVIA-P4000 (S/N 220804R2) inspection at Tier-1 Semiconductor Hwaseong NRD Line 3F with ZEISS AIMS 1x equipment — open-loop tests, feedback and feedforward transmissibility, VC curves (equipment off/on), and comparison with September 2022 baseline data.

POSCO FUTURE M GeminiSEM 560 DVIA-MB1000 (230704R3) Installation Report
DVIA-MB1000 installation report (serial 230704R3) for GeminiSEM 560 at POSCO FUTURE M 음극재 site. Summary-of-vibration table lists VC-class cells for Floor versus Active across Z/X/Y curves; embedded plots are floor and active VC curves per axis plus an equipment photograph. Decorative header/logo raster beneath the Word address block is omitted from publication. Reference follows the repo standard Generic Vibration Criteria markdown table (embedded reference raster not republished). The second Y-axis figure follows the Floor plot in Word but was captioned incorrectly twice as Floor; publication labels it Active VC curves to align with Z/X structure.