Vibration Isolation Case Studies

DVIA-MB1000 abbreviated worksheet (serial 230501R4). Setup dated 23.11.15 and reporting dated 24.07.05; measurement date 2023. 11.15 (Wednesday) with operator Chaewon Lee from DAEIL SYSTEMS. Site checklist fields Target equipment, Place of installation, and END USER are N/A on the form (dash in the source). The Overview uses the source DVIA-MB1000 wording. There is no vibration specification, equipment status, tuning request, measurement summary table, or Reference section in the source. The section title reads “M1000 internal program performance measurement result”; published figures are three plots under Vertical, Left to Right, and Front to Back.

DVIA-MB1000 installation report (serial 230512R3) for a JEOL JSM-IT800 FE-SEM delivered by Tier-1 Semiconductor in Ningbo, China. Tunings on May 28, 2024 were the second trial (first: 2023.08.23). Written by is N/A; vibration spec is N/A on the form; conclusion states the platform is appropriately installed and functioning. Published plots are transmissibility per axis, one equipment photo, and the standard VC reference as a markdown table.

DVIA-M-JSA (serial 230512R3) internal-program performance screenshots for Ningbo SMIC with ZEISS Sigma 300 VP target SEM and JEOL IT800 SEM fields on the issued Word form. Includes installation imagery after the M-JSA set-up line and Vertical / Left to Right / Front to Back curves from the M-JSA UI. The published outline follows headings present in the source file (no Measurement Summary or vibration-spec section).

DVIA-M1000 abbreviated worksheet (serial 230522R1) from MB1000 internal-program form. Setup dated 23.11.14 and reporting dated 24.07.05; measurement date 2023. 11.14 (Tuesday) with operator Chaewon Lee from DAEIL SYSTEMS. Target equipment is unstated on the form (N/A); place of installation and END USER read “-”; place of measurement is blank (N/A). Overview uses the standard DVIA-M1000 sentence. No vibration specification, equipment condition, tuning request, measurement summary table, or Reference section appears in the source. Section title “M1000 internal program performance measurement result”; published figures are three plots under Vertical, Left to Right, and Front to Back.

DVIA-M1000 abbreviated worksheet (serial 230522R2) for ZEISS FIB-SEM Crossbeam 550. Setup dated 23.08.16 and reporting dated 24.07.05; measurement date 2023.08.16 (Wednesday) with operator Chaewon Lee from DAEIL SYSTEMS. Place of installation, END USER, and place of measurement are N/A on the form. Overview states the standard DVIA-M1000 sentence. No vibration specification, equipment condition, tuning request, measurement summary table, or Reference section appears in the source. The internal-program section title reads “M1000 internal program performance measurement result”; published figures are three plots labeled Vertical, Left to Right, and Front to Back.

DVIA-M1000 internal-program handout (serial 230525R9) for ZEISS FIB-SEM Crossbeam350. The published form includes overview text, site/measurement lines, and M1000 internal program performance measurement screenshots for Vertical, Left to Right, and Front to Back only. The title graphic from the Word handout is omitted on the web; there is no measurement summary table, vibration specification figure, or Reference section in the source file.