Vibration Isolation Case Studies

DVIA-P2200 (serial 240501R1) installation report at Kyungpook National University Semiconductor Fusion Research Building B1 with JEOL JBX-8100FS electron beam lithography. Tuning and vibration measurement on September 3, 2024; engineer Chaewon Lee (DAEIL SYSTEMS). Published equipment vibration specification diagram and axis VC, narrowband, and transmissibility plots. Reference uses the Generic Vibration Criteria markdown table only.

TESCAN Solaris X FIB-SEM DVIA-ML1000 Installation

DVIA-M1000 installation report (serial 240704R3-1) for ZEISS SEM EVO 10. Overview matches the published form. Equipment condition: The equipment is installed. Published figures include UI-program plots as listed; Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-STONE-300 handout (serial 240513R3) titled (STONE-300_ 240513R3 Set up) with setup 24.08.13 and reporting 24.08.16. Thermo Fisher Spectra 300 S/TEM is recorded for Southern University of Science and Technology, Shenzhen. Overview, table fields, and measurement metadata follow the report verbatim; STONE-300 internal program screenshots are published under Vertical, Left to Right, and Front to Back. The worksheet does not include a separate vibration specification section, measurement summary table, or Reference section.

DVIA-M-UST1 vibration isolation installation report for Unisoku USM1400SA STM with serial M-UST1 230426R1-3. Good Performance noted on the remark line; administrative dates reflect an August 2024 onsite report and legacy business-trip dates shown on the same form layout. Publication includes aligned M-UST1 internal program measurement plots by axis (Vertical, Left to Right, Front to Back).

DVIA-M1000 (serial 240207R3) installation report for Guiyang Zhenhua Technology in Guiyang City, China. Equipment: Thermo Fisher Scientific Helios 5 FIB-SEM. Equipment condition per report: uninstalled. Chaewon Lee, tuning date August 8, 2024. The source report includes transmissibility plots for vertical, left-to-right, and front-to-back axes only (no VC curves or narrow-band autospectrum figures). Reference publishes the standard VC criteria as a markdown table.