Vibration Isolation Case Studies

DVIA-P4000 (serial 241202R4) tuning and vibration measurement at Tekscend Photomask CLB for a KLA KLA597XR Reticle Inspection System. Engineer Chaewon Lee (DAEIL SYSTEMS); measurement and report December 29, 2024; B&K LAN-XI DAQ and PCB 393B05. Equipment not installed at measurement time. Published vibration specification capture and vertical, left-to-right, and front-to-back velocity spectral density plots.

December 2024 DEMO shipment tuning and vibration report for DVIA‑T67 (serial 241213R2) at Korea Institute of Nano Technology 3F QRT lab — MSTech MST8500 probe station. Measurements with equipment Turned off; summary table cites Table vs DVIA‑T67; Brüel & Kjær Pulse Labshop acquisition; VC / Autospectrum / Transmissibility by axis plus equipment photo. Reference VC criteria as markdown only.

DVIA-M1000 installation report (serial 241010R2) — Self-made - -. Field package. UI-program transmissibility plots and equipment photo; Reference as markdown VC table.

DVIA-T56 (serial 130123R3) tuning and vibration measurement at Samsung Leaders Building Room 1104 — level foot rework, equipment-not-installed condition; VC curves, autospectrum, and transmissibility by axis.

DVIA-ML1000 installation report (serial 240710R2) for ZEISS FIB-SEM Crossbeam 550 at Tier-1 Semiconductor Cheonan C5. Overview describes on-site tuning and vibration measurement with the tool in IDLE after placement; measurement setup and equipment vibration limit VC-E appear in the specification capture. Measurement Summary includes a vertical floor line FAIL with platform PASS; horizontal axes PASS. Published plots: vibration specification capture, VC / Autospectrum / Transmissibility by axis. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

DVIA-M1000 installation report (serial 241101R6) — Ciqtek High Speed SEM HEM6000. Field package. UI-program transmissibility plots and equipment photo; Reference as markdown VC table.