Vibration Isolation Case Studies

DVIA-M1000 installation report — Hitachi FE-SEM SU8600 (serial 240308R2) for Hefei University of Technology in Xuancheng, Anhui, China. Overview states the platform is appropriately installed and functioning as intended. The published handout has no vibration specification section and no measurement summary table. Equipment condition: The equipment is installed. Tuning request is a single dash in the source form. Published figures: UI-program Transmissibility (vertical, left to right, front to back), on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table (no separate reference graphic).

UNIST Building 108 B1F Line JEOL JBX-8100FS electron beam lithography DVIA-P2200 tuning and vibration measurement with equipment Turned off. VC, narrowband, and transmissibility plots by axis.

DVIA-MO1000 installation report (serial 240930R7) for Epin STM in Shanghai, China; tuning January 14, 2025.

DVIA-M1000 serial 220121R3 — ZEISS Innovation Center handout for ZEISS Sigma 360 VP FE-SEM, installation and measurement in Shanghai. Overview and metadata match the published form; M1000 internal program performance plots labeled Vertical, Left to Right, and Front to Back from the UI program. Cover-only header graphics are not republished.

DVIA-P4000 (SN 230207R1) tuning and vibration measurement at Tier-1 Semiconductor Pyeongtaek P4 3rd floor line for Bruker nm-VI photomask repair. VC-D specification; axis VC, autospectrum, and transmissibility plots; measurement summary table.

DVIA-M1000 installation report (serial 241111R7) — Thermo Fisher Scientific FIB-SEM Helios. Field installation report. UI-program transmissibility plots and equipment photo; Reference as markdown VC table.