Installation Report

DVIA-P Series

01-10-2025

Tier-1 Semiconductor Pyeongtaek P4 Bruker nm-VI DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

Bruker

nm-VI

Photomask repair

DVIA-P4000

230207R1

Overview

Tuning and vibration measurement were performed on the DVIA-P4000 installed at Tier-1 Semiconductor Pyeongtaek Campus P4 3rd floor line.

After equipment placement, tuning and vibration measurement were conducted with the equipment Turned on.

The DVIA-P4000 was connected to a laptop; feedback and feedforward tuning were performed via the UI software, and vibration measurement with Data Physics equipment was used for performance verification.

Data are presented as VC curves with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P4000

Serial Number: 230207R1

Engineer

Chaewon Lee, Jonghwa Seo from DAEIL SYSTEMS

Measurement Date

January 6, 2025

Installation Site

Tier-1 Semiconductor Pyeongtaek P4 3rd floor line

End User

Tier-1 Semiconductor

Customer Equipment

Manufacturer: Bruker

Equipment: nm-VI

Model: Photomask repair

Equipment Status

장비 설치 및 Turned on

Vibration Specifications

VC-D

Measuring Equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Meets vibration specifications in all directions.

Measurement Data

Measuring Point	Status	Direction	Spec	Base pad — measurement	DVIA-P4000 — measurement	Base pad — result	DVIA-P4000 — result
Tier-1 Semiconductor Pyeongtaek P4 3rd floor line 1. Base pad 2. DVIA-P4000	장비 설치 및 Turned on	Vertical	VC-D	VC-D @ 50 Hz	VC-F @ 50 Hz	✓ PASS	✓ PASS
		Left to Right	VC-D	VC-C @ 63 Hz	VC-F @ 63 Hz	✗ FAIL	✓ PASS
		Front to Back	VC-D	VC-C @ 63 Hz	VC-G @63 Hz	✗ FAIL	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A