Vibration Isolation Case Studies

DVIA-U1000 re-tuning worksheet (serial 220919R6-1) for Goertek Inc. with ZEISS FE-SEM Sigma 300; tuning December 19, 2025, report written January 7, 2026 (Chaewon Lee). Overview cites Z-axis oscillation and gain reduction; location line "-" (N/A). Publishes Vertical, Left to Right, and Front to Back transmissibility UI plots only; equipment picture line Photo Not Allowed; decorative header bitmap and Reference EMF omitted — Reference uses the standard VC markdown table.

DVIA-UB700 (S/N 221024R5) inspection report for ZEISS FE-SEM Sigma 300 at Hanyang University, Natural Sciences Building, Room 112. Turned on/IDLE measurements: vertical, left-to-right, and front-to-back VC curves, autospectra, and transmissibility. LPF tuning on left-to-right and front-to-back removed initial active-mode oscillation; all directions meet vibration specification at pass levels shown in the measurement summary.

DVIA-ML1000 installation report (serial 241104R1).

DVIA-ML1000 installation report (serial 250331R2) for Unisoku STM — 3rd tuning on January 7, 2026 after oscillation and re-tuning. Engineer Chaewon Lee (DAEIL SYSTEMS). End User and Location N/A on the form; equipment model field N/A. Vibration Specification N/A; equipment condition The equipment is turned on/IDLE; Tuning Request N/A. Published UI-program autospectra and transmissibility (vertical, left-to-right, front-to-back) and equipment photo. No measurement summary table or VC curves on the form. Reference uses the standard Generic Vibration Criteria markdown table only.

DVIA-ML1000 installation report — ZEISS Crossbeam 350 FIB-SEM (serial 250806R2). Overview states the platform is appropriately installed and functioning as intended. Vibration-spec UI capture under Vibration Specification; Prepared for / End User / Location N/A. Manufacturer line in the report form reads ZEIS. Equipment Condition Turned on/IDLE; Tuning Request N/A. UI-program Autospectrum and Transmissibility per axis and equipment photo.

DVIA-ML1000 installation report — Ciqtek SEM5000X (251113R6). The active vibration isolation platform is appropriately installed and functioning as intended. Measurements with SEM5000X Turned on / IDLE; vibration specification N/A on the form; measurement summary compares floor vs on DVIA-ML1000 at dominant frequencies. UI-program plots and equipment photo.