Installation Report

DVIA-ULF Series

01-07-2026

Hanyang University ZEISS Sigma 300 DVIA-UB700 Inspection Report

DVIA-ULF Series

Inspection Report

Hanyang University

ZEISS

Sigma 300

DVIA-UB700

221024R5

Prepared by

Engineer: Chaewon Lee

Inspection date: 26.01.05

Report written date: 26.01.07

Overview

Inspection and vibration measurement were performed for the DVIA-UB700 installed in Room 112, Natural Sciences Building (Building 507), Hanyang University. Inspection and vibration measurement were performed with the equipment in the Turned on/IDLE state. Data are presented as VC curves and reference information on vibration levels is provided.

Platform

Model: DVIA-UB700

Serial Number: 221024R5

Engineer

DAEIL SYSTEMS Field Engineer Chaewon Lee

Inspection date

January 5, 2026

Installation site

Room 112, Natural Sciences Building, Hanyang University

End User

Hanyang University

Customer equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 300

Equipment specification

Equipment condition

Equipment installation and Turned on/IDLE

Vibration measurement instruments

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration measurement setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

On the initial inspection, oscillation occurred in Active mode. LPF was added on the Left to Right and Front to Back axes to remove the oscillation.

On the final inspection, the isolation platform was confirmed to operate stably and vibration specification is met in all directions.

Measurement data

Measurement site	Status	Direction	Meas. — Floor	Meas. — DVIA-UB700	Result — Floor	Result — DVIA-UB700
Hanyang University Natural Sciences Building Room 112 1. Floor 2. DVIA-UB700	Turned on/IDLE	Vertical	VC-C @ 31.5 Hz	VC-G @ 31.5 Hz	✓ PASS	✓ PASS
		Left to Right	VC-F @ 50 Hz	VC-G @ 50 Hz	✓ PASS	✓ PASS
		Front to Back	VC-E @ 20 Hz	VC-F @ 20 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Installation photo

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

*Notes:*

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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