Goertek Inc. ZEISS Sigma 300 DVIA-U1000 (220919R6-1) Installation Report

DVIA-U Series

Installation Report

Goertek

ZEISS

Sigma 300

DVIA-U1000

220919R6-1

Overview

Re-tuning was performed due to Z-axis oscillation.

DVIA-U1000 stability was secured by reducing the gain values.

Model: DVIA-ML1000

Serial Number: 220919R6-1

Chaewon Lee DAEIL SYSTEMS

December 19, 2025

26.01.07

Goertek Inc.

2nd

N/A

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 300

The equipment is turned on/IDLE

N/A

Photo Not Allowed

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A