Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Shenzhen Optiark EBPG5200 DVIA-P4000 (221212R1) Installation Report — GUANGDONG — 2023.02.15
DVIA-P4000 serial 221212R1 — compact setup handout for Shenzhen Optiark Semiconductor Technologies, target equipment EBPG5200, installation site GUANGDONG. Includes operator and trip dates, Overview with 2023.02.15 measurement metadata, and MB1000 internal program Z/X/Y axis performance screenshots from the source form. Header logo strip (image1) is not republished; no Reference section in the source.

LyondellBasell ZEISS EVO10 DVIA-M1000 (221221R2) Installation Report
DVIA-M1000 installation worksheet (serial 221221R2, source M1000_221221R2_23.02.15.docx). Measurement date 2023-02-15 with operator Youngha Lee (DAEIL SYSTEMS); end user LyondellBasell; ZEISS EVO10 with installation site SUZHOU. The worksheet has no vibration specification, equipment status, tuning request, measurement summary table, or Reference section. Section title reads “MB1000 internal program performance measurement result” with Z axis, X axis, and Y axis plots. Decorative header raster after the customer line and the cover-style photo before the checklist are omitted from the public page.

Vital Optics Technology Raith Voyager EBL DVIA-P2200 Installation Report
DVIA-P2200 (serial 221118R4) installation report for a Raith Voyager EBL at Vital Optics Technology, ANHUI. Measurement dated February 8, 2023; operator Hosang Yu (DAEIL SYSTEMS). Published figures: equipment set-up photo, MB1000 internal program performance plots (Z/X/Y), and octave band results (Z/X/Y). Floor VC-Class B/C/C and above-active E/E/E with good omnidirectional performance.

Oak Ridge National Laboratory Zeiss Gemini SEM 460 DVIA-MB1000 VEC (221013R2) Installation Report — 2023.02.07
DVIA-MB1000 VEC installation report (serial 221013R2, platform DVIA-MB1000-1000X1200X224H) for Zeiss Gemini SEM 460 at Oak Ridge National Labs, Tennessee. Prepared for Toya Beiswenger PhD; engineer Hosang Yu (DAEIL SYSTEMS). Tuning date February 1, 2023; report written February 7, 2023; business trip dates as stated on the form. Publishes per-axis transmissibility, floor VC, and active VC plots (Z-axis with stomping notation per source labels), equipment photograph, and Generic Vibration Criteria as a markdown table only (decorative header raster and Word Reference graphic omitted).
Institute of Semiconductors (CAS) Helios G5 Langfang DVIA-M1000 Installation Report
Helios G5 (Langfang), DVIA-M1000 (220520R3) — Thermo Scientific FIB‑SEM suite on DVIA‑M isolation; MB100 program transmissibility and coherence results.

Oxford University Suzhou Sigma300 DVIA-M1000 (220817R2) Installation Report
DVIA-M1000 abbreviated handout (serial 220817R2): Sigma300 at SUZHOU for Oxford University (Suzhou) Technology Co., Ltd. Covers setup and reporting dates (23.02.02 / 23.02.06), the Overview sentence, the measurement session on 2023.02.02 with operator listing from the form, and MB1000 internal program performance screenshots under Z / X / Y axis headings. Reference, vibration-limit tables, and Measurement Summary sections are not present in the source. A small internal sign-off table raster before the company name line is omitted from public copy.