KRISS FE SEM UB700 P1 Setup Report (2016-06-20)
Contents
Target equipment
FE SEM in-house developed model
Trip and report dates
Business trip date: 16.06.20
Trip personnel: Hyungmoon Choi, Doohyun Kim, Jongwook Lim
Report written date: 2016.06.20
Installation result summary
| Test Direction | VC-Class | ||
|---|---|---|---|
| Base | Top | ||
| ACTIVE | Z | C | E |
| X | E | G | |
| Y | E | G |
Vertical performance is good, but horizontal performance is somewhat insufficient. It appears performance was measured as insufficient because floor vibration is very low.
Images could not be verified due to insufficient high-voltage power supply facilities for the equipment.
Regarding insufficient performance, problems that did not occur at the research institute occurred in the field environment. When tuning the horizontal axis, FB control had no issues, but when FFF control was applied, severe swing of the base sensor occurred. Therefore, FFF gain could not be raised much to protect the actuator. For U_type systems that rely on FFF performance rather than FB performance, it is thought that performance in the field will be difficult. There was also an opinion from Manager Tanaka that the tuning program currently in use (M_type — Showa) may not be suitable for U_type, and inspection related to the program is planned.
