KRISS FE SEM UB700 Vibration Measurement Report (2016-06-21)

DVIA-U Series

Installation Report

Vibration Measurement

KRISS

Korea Research Institute of Standards and Science

FE SEM

UB700

VC-Class

2016

Jongwook Lim

Target equipment

FE SEM in-house developed model

Author and report date

Author: Jongwook Lim, Assistant Manager, DAEIL SYSTEMS

Report written date: 2016.06.21

Installation result summary

Test Direction	VC-Class
		Base	Top
ACTIVE	Z	C	E
ACTIVE	X	E	G
ACTIVE	Y	E	G

For the vertical axis, performance is good from C Class to E Class; for the horizontal axes, performance is good from E Class to G Class respectively.

Measurement sensors were placed as shown in the figure below to measure vibration of the laboratory floor (BASE) and the top of the vibration isolation platform (TOP).