Installation Report

DVIA-ULF Series

10-14-2025

Bruker Korea ZEISS Gemini SEM 560 DVIA-ULF1000 Installation Report

DVIA-ULF Series

Installation Report

ZEISS

Bruker

DVIA-ULF1000

250717R1

Garden Five

Prepared by

Engineer: Chaewon Lee

Measurement date: October 13, 2025

Report written date: October 14, 2025

Overview

Tuning and vibration measurements were performed on the DVIA-ULF1000 installed at Garden Five Tool Hall 5F, Bruker Korea Demo Lab.

Measurements were conducted with the equipment installed and Turned off.

Data are presented as VC curves; reference information on vibration levels is provided.

Vibration Isolation System Information

Model: DVIA-ULF1000

Serial Number: 250717R1

Engineer

Chaewon Lee, Field Engineer — DAEIL SYSTEMS

Measurement Date

October 13, 2025

Installation Site

Garden Five Tool Hall 5F, Bruker Korea Demo Lab

End User

Bruker Korea

Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: GeminiSEM 560

Equipment specification

Equipment Status

Equipment installed and Turned off

Measurement Device

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

The vibration specification is satisfied on all axes.

Measurement Summary

Measurement Point	Status	Axis	Measurement Data		Result
Measurement Point	Status	Axis	Floor	DVIA-ULF1000	Floor	DVIA-ULF1000
Garden Five Tool Hall 5F, Bruker Korea Demo Lab 1. Floor 2.DVIA-ULF1000	Equipment installed / Turned off	Vertical	VC-C @ 5 Hz	VC-G @ 5 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-D @ 12.5 Hz	VC-G @ 12.5 Hz	✓ PASS	✓ PASS
		Front to Back	VC-C @ 1 Hz	VC-E @ 1 Hz	✗ FAIL	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Installation Photo

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A