Installation Report

DVIA-ULF Series

10-14-2025

Bruker Korea ZEISS Solaris GeminiSEM 560 DVIA-ULF1000 (250717R1) Installation Report

DVIA-ULF Series

Installation Report

Bruker

ZEISS

Solaris GeminiSEM 560

DVIA-ULF1000

250717R1

Written by

Engineer: Chaewon Lee

Tuning Date: 25.10.13

Report Written Date: 25.10.14

Overview

This report outlines the installation details of DVIA-ULF1000 modular active vibration isolation platforms for ZEISS GeminiSEM 560 FE-SEM systems at Bruker Korea Demo lab.

DAEIL installed the DVIA-ULF1000 platform on a solid ground floor.

DAEIL performed site-specific tuning and vibration measurements along with six axes to assess and verify system performance.

All measured vibration data have been converted into VC (Vibration Criteria) curves. These curves are included in the report as a reference standard for current site assessment and future performance verification of the installed FE-SEM systems.

Tuning Date

13TH Oct, 2025

Installation Site

Bruker Korea Demo Lab

Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Solaris GeminiSEM 560

Measurement Device

8.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

Bandwidth: 200 Hz

Lines: 3200

Averaging: FFT Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Averaging mode: Exponential, 40

Vibration Specification

Conclusion

After the installation of the ULF, floor vibration was reduced to within the vibration specification in all axes.

Measurement Summary

Measurement Point	Status	Axis	Floor	DVIA-ULF1000	Floor	DVIA-ULF1000
5F, Bruker Korea Demo실 1. Floor 2. DVIA-ULF1000	Equipment Installed / Turned off	Vertical	VC-C @ 5 Hz	VC-G @ 5 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-D @ 12.5 Hz	VC-G @ 12.5 Hz	✓ PASS	✓ PASS
		Front to Back	VC-C @ 1 Hz	VC-E @ 1 Hz	✗ FAIL	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Installation Photo

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

*Notes:*

1. VC-A/B is measured in one-third octave bands over 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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