Tier-1 Semiconductor Hwaseong ZEISS AIMS™ 1X-193i DVIA-P4000 (034014B) Installation Report
Contents
Overview
Inspection and vibration measurement were conducted on the DVIA-P4000 installed at Tier-1 Semiconductor Hwaseong site NRD Line 3F 7bay.
Inspection included equipment installation and IDLE configuration.
On the initial visit, structural elements installed above the vibration isolation platform interfered with its motion and were removed prior to tuning work.
A booth structure adjoining the qualification equipment perimeter was coupled to the vibration isolation platform, and elevated vibration emanating from the booth was observed; such inputs can affect vibration isolation performance and measurement outcomes.
The vibration isolation platform was Turned off on the initial visit; vibration data under Turned off as well as under active tuned conditions after service were captured for comparison.
Data are plotted as VC curves with reference criterion context.
Vibration isolation platform
Model: DVIA-P4000
Serial Number: 034014B
Engineer
Chaewon Lee, DAEIL SYSTEMS FIELD ENGINEER
Inspection Date
October 23, 2025
Installation Site
Tier-1 Semiconductor Hwaseong site NRD Line 3F 7bay
End User
Tier-1 Semiconductor
Customer equipment
Manufacturer: ZEISS
Equipment: Photomask Qualification
Model: AIMS™ 1X-193i
Equipment Specification
VC-C
Equipment Status
Equipment installed and IDLE
Measuring instruments
10.1) Data Physics DAQ
– Hardware: QUATTRO, Serial Number: 22436
– Software: SignalCalc ACE
10.2) Accelerometer
– PCB Accelerometer
– Model: 393B05
Measuring set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
On initial inspection with the vibration isolation platform Turned off, all axes were SPEC out-of-spec.
After tuning service, measurements met the specification across all axes.
Measurement Data
| Measuring Point | Status | Direction | Specification | Measurement (floor — Turned off) | Measurement (DVIA-P4000 — Turned off) | Result (floor) | Result (DVIA-P4000) |
|---|---|---|---|---|---|---|---|
| Turned off | DVIA-P4000 | Turned off | DVIA-P4000 | ||||
| Tier-1 Semiconductor Hwaseong site NRD Line 3F 7bay 1. Turned off 2. DVIA-P4000 | Equipment installed and IDLE | Vertical | VC-C | VC-B @ 31.5 Hz | VC-E @ 31.5 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-B @ 40 Hz | VC-E @ 40 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | VC-B @ 31.5 Hz | VC-C @ 31.5 Hz | ✗ FAIL | ✓ PASS |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Left to Right VC Curves
Left to Right Autospectrum
Front to Back VC Curves
Front to Back Autospectrum
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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