Tier-1 Semiconductor Giheung SR1 ZEISS AIMS™ 1X-193i DVIA-P4000 (190104R4) Installation Report
Contents
Overview
Inspection and vibration measurement were performed on the DVIA-P4000 installed on the Tier-1 Semiconductor Giheung SR1 5F line.
Inspection and vibration measurement were conducted with the equipment installed and in IDLE state.
A booth structure was connected adjacent to the equipment on the isolator, and strong vibration from that booth was observed continuously. This vibration is likely to affect isolator performance and vibration measurement results.
Exhaust fans were operating at nearby equipment toward the equipment on the isolator; airflow-related effects may also influence isolator performance and measurement results.
Data are presented as VC curves with reference material on vibration levels.
Isolation Platform
Model: DVIA-P4000
Serial Number: 190104R4
Engineer
Chaewon Lee from DAEIL SYSTEMS
Measurement Date
October 14, 2025
Report Written Date
October 15, 2025
Inspection Date
October 14, 2025
Installation Site
Tier-1 Semiconductor Giheung SR1 5F line
End User
Tier-1 Semiconductor
Equipment Information
Manufacturer: ZEISS
Equipment: Photomask Qualification
Model: AIMS™ 1X-193i
Equipment specification
N/A
Equipment Status
Equipment installed and IDLE
Measuring Equipment
10.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
At the initial isolator inspection, the four units did not float at the same height; unit float heights differed (Unit 1: 1.2 mm, Unit 2: 2.3 mm, Unit 3: 3.8 mm).
The DVIA-P Series is designed so that four units float at the same height; during the site visit, leveling was checked, and each unit’s float height was reset to 2.5 mm.
From 12.5–31.5 Hz in all directions, isolator performance was measured somewhat lower, due to vibration from the booth structure connected to the equipment on the isolator and exhaust fans operating toward the isolator from nearby equipment. Outside that band, vibration at VC-F or below was measured in all directions.
Measurement Data
| Measuring Point | State | Direction | Floor vibration | DVIA-P4000 |
|---|---|---|---|---|
| Tier-1 Semiconductor Giheung SR1 5F line 1. Floor vibration 2. DVIA-P4000 | Equipment installed and IDLE | Vertical | VC-C @ 100 Hz | VC-G @ 100 Hz |
| Left to Right | VC-C @ 63 Hz | VC-F @ 63 Hz | ||
| Front to Back | VC-D @ 3.15 Hz | VC-G @ 3.15 Hz |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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