Installation Report

DVIA-ULF Series

12-11-2025

Northern Huachuang TESCAN CLARA DVIA-ULF700 (250902R6) installation report — 2025-12-11

DVIA-ULF Series

Installation Report

TESCAN

SEM

CLARA

Northern Huachuang

250902R6

Beijing

Overview

The DVIA-ULF700 unit was installed under the level foot of the TESCAN CLARA system, and tuning was performed.

The CLARA cooler was installed directly on top of the unit. The vibration generated by the cooler was being transmitted directly into the unit, which could significantly affect the performance of the ULF700

After tuning, the VC-G vibration level was measured. We expect no major issues for normal equipment operation.

Vibration Isolation System Information

Model: DVIA-ULF700

Serial Number: 250902R6

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

December 10, 2025

End User

Northern Huachuang

Number of Tuning Trial

1st

Location

Beijing, China

Equipment

Manufacturer: TESCAN

Equipment: SEM

Model: CLARA

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

Measurement Summary

Measurement Point	Status	Axis	Measurement Data
Measurement Point	Status	Axis	Floor	DVIA-ULF700
1. Floor 2. DVIA-ULF700	CLARA is turned on/IDLE	Vertical	VC-C @ 40 Hz	VC-G @ 40 Hz
		Left to Right	VC-F @ 12.5 Hz	VC-G @ 12.5 Hz
		Front to Back	VC-F @ 12.5 Hz	VC-G @ 12.5 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Photo Not Allowed

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A