Installation Report
DVIA-ULF Series
04-13-2026
NAURA Technology Group Beijing TESCAN CLARA FE-SEM DVIA-ULF700 (250902R6) installation report — 2026-04-13
DVIA-ULF Series
Installation Report
NAURA Technology Group
TESCAN
CLARA
FE-SEM
Beijing
DVIA-ULF700
250902R6
Contents
Overview
After retuning the DVIA-ULF700 active vibration isolation platform is appropriately functioning as intended.
Vibration Isolation System Information
Model: DVIA-ULF700
Serial Number: 250902R6
Engineer
Chaewon Lee DAEIL SYSTEMS
Tuning Date
April 13, 2026
End User
NAURA Technology Group
Number of Tuning Trial
2nd(1st: 25.12.10)
Location
Beijing, China
Equipment
Manufacturer: TESCAN
Equipment: FE-SEM
Model: CLARA
Vibration Specification
Equipment Condition
The equipment is turned on/IDLE
Tuning Request
Measurement Summary
| Measurement Point | Status | Axis | Vibration Specification | Floor RMS (μm/s) | DVIA-ULF700 RMS (μm/s) | Floor Result | DVIA-ULF700 Result |
|---|---|---|---|---|---|---|---|
| 1.Floor 2.DVIA-ULF700 | Equipment is Turned on/IDLE | Vertical | Based on Vibration Specification Pneumatic | 7.21 @ 14.7 Hz | 0.08 @ 14.7 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | 3.33 @ 14.8 Hz | 0.025 @ 14.8 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | 0.86 @ 14.8 Hz | 0.004 @ 14.8 Hz | ✓ PASS | ✓ PASS |
Measurement Data Obtained via UI Program
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
13. Reference
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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Case Study Information
Category
Installation Report
SeriesDVIA-ULF Series
Date04-13-2026
Tags
DVIA-ULF Series
Installation Report
NAURA Technology Group
TESCAN
CLARA
FE-SEM
Beijing
DVIA-ULF700
250902R6
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