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Installation Report
DVIA-ULF Series
05-14-2026

Shanghai Opotong Thermo Scientific Axia SEM DVIA-ULFB700 Installation Report

DVIA-ULF Series
Installation Report
Shanghai Opotong
Thermo Fisher Scientific
SEM
Axia
DVIA-ULFB700
260202R1-5

Overview

The DVIA-ULFB700 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ULFB700

Serial Number: 260202R1-5

Engineer

Juhyeok Kim DAEIL SYSTEMS

Tuning Date

May 14, 2026

End User

Shanghai Opotong Instruments Co., Ltd.

Number of Tuning Trial

1st

Location

Shanghai, China.

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: SEM

Model: Axia

Vibration Specification

N/A

(I heard that Thermo Fisher Scientific sets the VC vibration specification standard every time we do it. I don't have YIMO, and I heard that the VC vibration standard specification changes every time in the equipment specification, so I couldn't write down the exact vibration specification.)

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

1st

Measurement Summary

Measurement PointStatusAxisVibration SpecificationFloorDVIA-ULFB700
1.Floor
2.DVIA-ULFB700
Equipment is Turned on/IDLEVerticalN/AVC-B@ 3.15 HzVC-F@ 3.15 Hz
Left to RightVC-E@ 3.15 HzVC-G@ 3.15 Hz
Front to BackVC-D@ 2.5 HzVC-G@ 2.5 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

*Notes:*

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-ULF Series
Date05-14-2026
Tags
DVIA-ULF Series
Installation Report
Shanghai Opotong
Thermo Fisher Scientific
SEM
Axia
DVIA-ULFB700
260202R1-5