Korea Institute of Science and Technology (KIST) TESCAN Clara FE-SEM DVIA-ULFB700 Installation Report — 2026.04.29
Contents
Customer
Korea Institute of Science and Technology
Author
N/A
Engineer
Chaewon Lee from DAEIL SYSTEMS
Installation Date
April 28, 2026
Report Written Date
April 29, 2026
Overview
Tuning and vibration measurement were conducted on the DVIA-ULFB700 installed at the Korea Institute of Science and Technology, L0 Building, room 184.
Tuning and vibration measurement were performed with the equipment in Turned on/IDLE state.
During tuning and measurement, the cooling fan installed under the Clara tool was operating, and airflow from the cooling fan was found to be delivered directly to the isolation platform top plate. Such external airflow can affect tuning and vibration measurement results.
After plotting data as VC curves, reference material on vibration levels is provided.
Vibration Isolation System Information
Model: DVIA-ULFB700
Serial Number: 260227R2
Tuning Date
April 28, 2026
Installation Site
Korea Institute of Science and Technology, L0 Building, room 184
End User
Korea Institute of Science and Technology
Customer Equipment
Manufacturer: TESCAN
Equipment: FE-SEM
Model: Clara
Equipment specification
< 5 um/s below 30 Hz; < 10 um/s above 30 Hz
Equipment Status
장비 설치 및 Turned on/IDLE
Measuring equipment
10.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
From about 16 Hz upward, owing to influence of the cooling fan installed above the isolation platform, vibration measured on the DVIA-ULFB700 exceeds floor vibration values. This is not an isolation platform deficiency; vibrations from equipment operation plus airflow originating from the cooling fan were captured in the measurements.
Measurement summary values appended here are taken in bands that are less affected by the cooling fan.
In bands not affected by the cooling fan, VC-G vibrations are measured in all directions.
Vibration specification is satisfied in all directions.
Measurement Summary
| Measurement site | State | Vibration specification | Direction | Floor vibration | DVIA-ULFB700 | Floor vibration | DVIA-ULFB700 |
|---|---|---|---|---|---|---|---|
| Korea Institute of Science and Technology, L0 Building, room 184 1. Floor vibration 2. DVIA-ULFB700 | Turned on/ IDLE | up to 30 Hz < 5 um/s above 30 Hz <10 um/s | Vertical | VC-D @ 16 Hz | VC-G @ 16 Hz | ✓ PASS | ✓ PASS |
| Left to Right | VC-F @ 20 Hz | VC-G @ 20 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | VC-G @ 12.5 Hz | VC-G @ 12.5 Hz | ✓ PASS | ✓ PASS |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Equipment picture
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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