Tier-1 Semiconductor 2F Clean Booth Self-made Equipment DVIA-ULF700 (250708R1-1) Installation Report
Contents
Overview
Tier-1 Semiconductor 2F 클린부스에 설치된 DVIA-ULF700 튜닝 및 진동측정 진행하였습니다.
장비 설치 및 Turned on/IDLE 상태로 튜닝 및 진동측정 진행하였습니다.
제진대 상부에 장비와 연결된 로터리 펌프가 작동중이었습니다. 이는 튜닝 및 진동측정에 영향을 줄 수 있습니다.
Data를 VC Curve로 표기 후 진동 수준에 대한 Reference 자료를 제공합니다.
Vibration isolation platform
Model: DVIA-ULF700
Serial number: 250708R1-1
Engineer
대일시스템 필드엔지니어 이채원
Measurement date
2025년 11월 04일
Installation site
Tier-1 Semiconductor 2F clean booth
End user
Tier-1 Semiconductor
Customer equipment
Manufacturer: Tier-1 Semiconductor
Equipment: -
Model: Self-made
Equipment specification
-
Equipment status
장비 설치 및 Turned on/IDLE
Measuring equipment
10.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration measurement setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
Apart from selected frequencies influenced by rotary pump vibration, VC-F–VC-G level vibration was observed.
Measurement summary
| Measurement site | Measurement point | Equipment status | Axis | Floor vibration | DVIA-ULF700 |
|---|---|---|---|---|---|
| Tier-1 Semiconductor 2F clean booth | 1. Floor vibration 2. DVIA-ULF700 | 장비 설치 및 Turned on/IDLE | Vertical | Residential Area @ 50 Hz | VC-F @ 50 Hz |
| Left to Right | VC-C @ 50 Hz | VC-G @ 50 Hz | |||
| Front to Back | VC-B @ 50 Hz | VC-G @ 50 Hz |
Data and image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Generic vibration criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
Reference
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