Tier-1 Semiconductor 2F Clean Booth DVIA-ULF700 (250708R1-1) Installation Report
Contents
Overview
Tuning and vibration measurements were performed for the DVIA-ULF700 installed in the Tier-1 Semiconductor fab 2F clean booth.
Tuning and vibration measurements were performed with the equipment installed and in Turned on/IDLE.
A rotary pump connected to the equipment was operating above the vibration isolation platform, which may affect tuning and vibration measurement.
Measured data are presented as VC curves and reference materials on vibration levels are provided.
Vibration isolation platform
Model: DVIA-ULF700
Serial Number: 250708R1-1
Engineer
Chaewon Lee — Field Engineer, DAEIL SYSTEMS Co., Ltd.
Measurement Date
November 4, 2025
Installation Site
Tier-1 Semiconductor fab, 2F clean booth
End User
Tier-1 Semiconductor
Equipment
Manufacturer: Tier-1 Semiconductor
Equipment: N/A
Model: Self-made
Equipment Specifications
N/A
Equipment Status
Equipment installed and Turned on/IDLE
Measuring Instruments
10.1) Data Physics DAQ — Hardware: QUATTRO, Serial Number: 22436 — Software: SignalCalc ACE
10.2) Accelerometer — PCB Accelerometer — Model: 393B05
Measurement Setup
F Span: 200 Hz · Lines: 3200 · Engineering Units: m/s · Window: Hanning · Averaging: FFT Spectrum Averaging · Averaging mode: Exponential, 40
Conclusion
Except at specific frequencies affected by the rotary pump, vibration levels from VC-F through VC-G are measured.
Measurement Data
| Measurement Site | Status | Axis | Floor | DVIA-ULF700 |
|---|---|---|---|---|
| Tier-1 Semiconductor fab 2F clean booth 1. Floor vibration 2. DVIA-ULF700 | Turned on/IDLE | Vertical | Residential Area @ 50 Hz | VC-F @ 50 Hz |
| Left to Right | VC-C @ 50 Hz | VC-G @ 50 Hz | ||
| Front to Back | VC-B @ 50 Hz | VC-G @ 50 Hz |
Data and Images
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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