Skip to main content
Installation Report
DVIA-ULF Series
07-14-2025

Liupan Mountain Laboratory ZEISS Sigma 360 FE-SEM DVIA-U700 (241115R3) Installation Report — Yinchuan

DVIA-U Series
Installation Report
Liupan Mountain Laboratory
Yinchuan
ZEISS
Sigma 360
FE-SEM
DVIA-U700
241115R3
YIMO

Contents

Prepared by

Engineer: Chaewon Lee

Tuning date: 25.07.14

Report written date: 25.07.14

Overview

The DVIA-U700 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-U700

Serial Number: 241115R3

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

July 14, 2025

End User

Liupan Mountain Laboratory

Number of Tuning Trial

1st

Location

Yinchuan, China

Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 360

Equipment Condition

The equipment is installed/IDLE

Tuning Request

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

*Notes:*

1. VC-A/B is measured in one-third octave bands over 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-ULF Series
Date07-14-2025
Tags
DVIA-U Series
Installation Report
Liupan Mountain Laboratory
Yinchuan
ZEISS
Sigma 360
FE-SEM
DVIA-U700
241115R3
YIMO

Related Case Studies

Shenzhen BYD Lithium Battery ZEISS Sigma 360 DVIA-U1000 (250107R2) Installation Report
DVIA-ULF Series

Shenzhen BYD Lithium Battery ZEISS Sigma 360 DVIA-U1000 (250107R2) Installation Report

05-18-2026Read more
YIMO ZEISS Sigma 360 FE-SEM DVIA-ULF700 Installation Report (retuning after degraded performance)
DVIA-ULF Series

YIMO ZEISS Sigma 360 FE-SEM DVIA-ULF700 Installation Report (retuning after degraded performance)

03-18-2026Read more
Shenzhen BYD ZEISS Sigma 360 DVIA-U1000 (240308R3) Installation Report — Shenzhen
DVIA-ULF Series

Shenzhen BYD ZEISS Sigma 360 DVIA-U1000 (240308R3) Installation Report — Shenzhen

02-20-2025Read more