Little Swan UB1000 P6 China Business Trip Report — Zeiss EVO 18 SEM (2018-05-10)

Target equipment – EVO 18 ( ZEISS SEM )

Traveler: CHOI SUNG WON

Trip date: 18.05.10

Report written: 2018.05.14

PASSIVE state is good; ACTIVE performance is good at approximately -26 to -30 dB near 10 Hz.

For PASSIVE, data was not accurate, so the PASSIVE state was estimated by hand-shaking.

Floor vibration environment measured as vertical D Class, horizontal X E Class, horizontal Y E Class.

With ACTIVE on, the isolator top measured vertical E Class, horizontal X E Class, horizontal Y E Class.

Insufficient Class improvement is because isolation effect is almost none in the 1–2 Hz low-frequency band; sufficient isolation effect exists in other regions.

Equipment image could not be confirmed because microscope setup was incomplete.