UB1000 P2 Chengdu China Business Trip Report — Zeiss EVO 18 SEM (2016-09-02)

Target equipment – EVO 18 ( ZEISS SEM )

Business trip dates: 16.08.30 ~ 16.09.01

Travelers: CHOI HYOUNGMUN, LIM JONG UK

Report written: 2016.09.02

16.08.30

Departure; arrival in Chengdu, China

16.08.31

UB1000_P2 setup

Equipment image verification

Vibration environment measurement and customer response

16.09.01

Additional equipment installation, performance re-measurement. Good performance.

Return

PASSIVE state is good; ACTIVE performance is good at approximately -30 dB near 10 Hz.

For PASSIVE, clean data was obtained on the Z axis via excitation, but horizontal-axis data was not accurate, so the PASSIVE state was estimated by hand-shaking. (See Attachment 1.)

Floor vibration environment measured as vertical B Class, horizontal X E Class, horizontal Y D Class.

With ACTIVE on, the isolator top measured vertical E Class, horizontal X D Class, horizontal Y E Class. (See Attachment 2.)

X-axis top appears worse than base because of the peak at 70 Hz.

Peaks near 70 Hz occur in all directions, attributed to the equipment internal fan. Performance graphs with SEM equipment ON/OFF were compared for verification. (See Attachment 3.)

Equipment image review confirmed that NEMO and the customer are satisfied with the performance.

Case 1 : With all 8 springs ( Z axis reference )

PASSIVE resonance approximately 12~13 Hz.

ACTIVE maximum performance confirmed at -22 dB.

Case 2 : With 4 springs , see figure below ( Z axis reference )

PASSIVE resonance approximately 5 Hz.

ACTIVE maximum performance confirmed at -35 dB.